{"product_id":"e10600-semi-e106-overview-guide-to-semi-standards-for-physical-interfaces-and-carriers-for-300-mm-wafers","title":"E10600 - SEMI E106 - Overview Guide to SEMI Standards for Physical Interfaces and Carriers for 300 mm Wafers","description":"\u003cp\u003eThis standard was technically approved by the global Physical Interfaces \u0026amp; Carriers Committee. This edition was approved for publication by the global Audits \u0026amp; Reviews Subcommittee on April 30, 2010. Initially available at www.semi.org in June 2010. Originally published October 2000; previously published November 2004. This document replaces SEMI PR6-0200 in its entirety. \u003c\/p\u003e \u003cp\u003e \u003c\/p\u003e \u003cp\u003eNOTICE: This document was balloted and approved for withdrawal in 2010. \u003c\/p\u003e \u003cp\u003e \u003c\/p\u003e \u003cp\u003eThis document is intended to help users and suppliers of 300 mm carriers and production equipment to understand the complex interdependencies among the SEMI Standards for 300 mm physical interfaces and carriers and to determine which standards apply to which products. \u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003eSEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers\u003cbr\u003eSEMI E10 — Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM)\u003cbr\u003eSEMI E15 — Specification for Tool Load Port\u003cbr\u003eSEMI E15.1 — Specification for 300 mm Tool Load Port\u003cbr\u003eSEMI E19 — Standard Mechanical Interface (SMIF)\u003cbr\u003eSEMI E19.4 — 200 mm Standard Mechanical Interface (SMIF)\u003cbr\u003eSEMI E21.1 — Cluster Tool Module Interface 300 mm: Mechanical Interface and Wafer Transport Standard\u003cbr\u003eSEMI E22.1 — Cluster Tool Module Interface 300 mm: Transport Module End Effector Exclusion Volume Standard\u003cbr\u003eSEMI E23 — Specification for Cassette Transfer Parallel I\/O Interface\u003cbr\u003eSEMI E25 — Cluster Tool Module Interface: Module Access Guideline\u003cbr\u003eSEMI E26.1 — Radial Cluster Tool Footprint 300 mm Standard\u003cbr\u003eSEMI E45 — Test Method for the Determination of Inorganic Contamination from Minienvironments Using Vapor Phase Decomposition-Total Reflection X-Ray Spectroscopy (VPD-TXRF), VPD-Atomic Absorption Spectroscopy (VPD-AAS), or VPD\/Inductively Coupled Plasma-Mass Spectrometry (VPD\/ICP-MS)\u003cbr\u003eSEMI E46 — Test Method for the Determination of Organic Contamination from Minienvironments Using Ion Mobility Spectrometry (IMS)\u003cbr\u003eSEMI E47.1 — Provisional Mechanical Specification for Boxes and Pods Used to Transport and Store 300 mm Wafers\u003cbr\u003eSEMI E57 — Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers\u003cbr\u003eSEMI E62 — Provisional Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)\u003cbr\u003eSEMI E63 — Mechanical Specification for 300 mm Box Opener\/Loader to Tool Standard (BOLTS-M) Interface\u003cbr\u003eSEMI E64 — Specification for 300 mm Cart to SEMI E15.1 Docking Interface Port\u003cbr\u003eSEMI E70 — Guide for Tool Accommodation Process\u003cbr\u003eSEMI E72 — Specification and Guide for 300 mm Equipment Footprint, Height, and Weight\u003cbr\u003eSEMI E82 — Specification for Interbay\/Intrabay AMHS SEM (IBSEM)\u003cbr\u003eSEMI E83 — Specification for 300 mm PGV Mechanical Docking Flange \u003cbr\u003eSEMI E84 — Specification for Enhanced Carrier Handoff Parallel I\/O Interface \u003cbr\u003eSEMI E85 — Specification for Physical AMHS Stocker to Interbay Transport System Interoperability\u003cbr\u003eSEMI E92 — Specification for 300 mm Light Weight and Compact Box Opener\/Loader to Tool-Interoperability Standard (BOLTS\/Light))\u003cbr\u003eSEMI E99 — The Carrier ID Reader\/Writer Functional Standard: Specification of Concepts, Behavior, and Services\u003cbr\u003eSEMI E99.1 — Specification for SECS-I and SECS-II Protocol for Carrier ID Reader\/Writer Functional Standard\u003cbr\u003eSEMI E100 — Specification for a Reticle SMIF Pod (RSP) Used to Transport and Store 6 Inch or 230 mm Reticles\u003cbr\u003eSEMI E101 — Guide for EFEM Functional Structure Model\u003cbr\u003eSEMI E103 — Provisional Mechanical Specification for a 300 mm Single-Wafer Box System that Emulates a FOUP\u003cbr\u003eSEMI G74 — Specification for Tape Frame for 300 mm Wafers\u003cbr\u003eSEMI G77 — Specification for Frame Cassette for 300 mm Wafers\u003cbr\u003eSEMI M1.15 — Standard for 300 mm Polished Monocrystalline Silicon Wafers (Notched)\u003cbr\u003eSEMI M8 — Specification for Polished Monocrystalline Silicon Test Wafers\u003cbr\u003eSEMI M28 — Specifications for Developmental 300 mm Diameter Polished Single Crystal Silicon Wafers\u003cbr\u003eSEMI M29 — Specification for 300 mm Shipping Box\u003cbr\u003eSEMI M31 — Provisional Mechanical Specification for Front-Opening Shipping Box Used to Transport and Ship 300 mm Wafers\u003cbr\u003eSEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment\u003cbr\u003eSEMI S8 — Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment\u003cbr\u003eSEMI S11 — Environmental, Safety, and Health Guidelines for Semiconductor Manufacturing Equipment Minienvironments\u003cbr\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E106-1104 (Withdrawn 0710) - Withdrawn","offer_id":40234340778051,"sku":"8078","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_2a674256-d72f-4062-8f21-52c1006329e2.png?v=1776702159","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e10600-semi-e106-overview-guide-to-semi-standards-for-physical-interfaces-and-carriers-for-300-mm-wafers","provider":"SEMI Dev 2","version":"1.0","type":"link"}