{"product_id":"e10100-semi-e101-guide-for-efem-functional-structure-model","title":"E10100 - SEMI E101 - Guide for EFEM Functional Structure Model","description":"\u003cp class=\"StdsText\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eProductivity improvement is the task with the highest priority in semiconductor factories of the 300 mm generation, and computer-integrated manufacturing or factory automation (CIM\/FA) technologies become more and more important to accomplish it. The standardization of these technologies is also necessary to provide the CIM\/FA infrastructure in a short period of time at a low cost. Since the standards will have to cover a wide range of production equipment, communication hardware, and software tools, it is very important that the standards have a high degree of compatibility. In order to improve the compatibility, this Guide provides a functional structure model of an Equipment Front End Module (EFEM) that handles carriers and substrates at the interface between the factory material handling system and the process equipment.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eThe major purposes of this Guide are as follows:\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsListNumbered\"\u003e\u003cfont size=\"2\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e1.\u003cspan style='font-variant-numeric: normal; font-variant-east-asian: normal; font-stretch: normal; line-height: normal; font-family: \"Times New Roman\";'\u003e  \u003c\/span\u003e\u003c\/span\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003eprovide a common understanding of functions of EFEM and associated interfaces between functional elements (components with particular function roles),\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsListNumbered\"\u003e\u003cfont size=\"2\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e2.\u003cspan style='font-variant-numeric: normal; font-variant-east-asian: normal; font-stretch: normal; line-height: normal; font-family: \"Times New Roman\";'\u003e  \u003c\/span\u003e\u003c\/span\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003eprovide a common understanding of the hierarchical structure of functions and their interfaces in an EFEM,\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsListNumbered\"\u003e\u003cfont size=\"2\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e3.\u003cspan style='font-variant-numeric: normal; font-variant-east-asian: normal; font-stretch: normal; line-height: normal; font-family: \"Times New Roman\";'\u003e  \u003c\/span\u003e\u003c\/span\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003eprovide a common understanding of possible units used for maintenance, adjustment, and control, and\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsListNumbered\"\u003e\u003cfont size=\"2\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e4.\u003cspan style='font-variant-numeric: normal; font-variant-east-asian: normal; font-stretch: normal; line-height: normal; font-family: \"Times New Roman\";'\u003e  \u003c\/span\u003e\u003c\/span\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003eprovide a map between EFEM functional elements and existing standards.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsText\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e　\u003c\/p\u003e\u003cfont face=\"arial\" size=\"2\"\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003c\/font\u003e\u003cp\u003e\u003cfont size=\"2\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003eSEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsText\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eSEMI E15 — Specification for Tool Load Port\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsText\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eSEMI E15.1 — Specification for 300 mm Tool Load Port\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsText\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eSEMI E19 — Standard Mechanical Interface (SMIF)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsText\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eSEMI E23 — Specification for Cassette Transfer Parallel I\/O Interface\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsText\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eSEMI E47.1 — Mechanical Specification for FOUPS Used to Transport and Store 300 mm Wafers\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsText\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eSEMI E57 — Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsText\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eSEMI E64 — Specification for 300 mm Cart to SEMI E15.1 Docking Interface Port\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsText\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eSEMI E84 — Specification for Enhanced Carrier Handoff Parallel I\/O Interface\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style=\"line-height: 14.2667px; 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