{"product_id":"e10000-semi-e100-specification-for-a-reticle-smif-pod-rsp-used-to-transport-and-store-6-inch-or-230-mm-reticles","title":"E10000 - SEMI E100 - Specification for a Reticle SMIF Pod (RSP) Used to Transport and Store 6 Inch or 230 mm Reticles","description":"\u003cp class=\"StdsHead1\" style=\"text-align: justify; break-after: auto;\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eNOTICE: This Standard or Safety Guideline has Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e \u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eThis Standard specifies the Reticle SMIF Pod (RSP) used to transport and store 6 inch or 230 mm reticles in a reticle (photomask) or integrated circuit (IC) manufacturing facility.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsH1\"\u003e\u003cbr\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eThis Standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and inter-changeability at all mechanical interfaces. Most of the requirements given in this Specification are in the form of maximum or minimum dimensions with very few required surfaces. Only the physical interfaces for the RSP are specified; no materials requirements or micro-contamination limits are given in this Specification.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e \u003c\/font\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eThe pellicle exclusion volumes of this Specification accommodate pellicles which extend the full length of the reticles. The pellicle exclusion volume widths are limited to 151 mm for 230 mm reticles, and 129 mm for 6 inch reticles.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e\u003cfont face=\"arial\" size=\"2\"\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003c\/font\u003e\u003cp class=\"StdsText\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eSEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsText\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eSEMI E19.4 — 200 mm Standard Mechanical Interface (SMIF)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsText\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eSEMI E30.1 — Inspection and Review Specific Equipment Model (ISEM)\u003cs\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/s\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsText\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eSEMI E47.1 — Mechanical Specification for FOUPS Used to Transport and Store 300 mm Wafers\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsText\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eSEMI E57 — Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsText\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eSEMI P5 — Specification for Pellicles\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style=\"line-height: 14.2667px; font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E100-1104 (Reapproved 0710) - Inactive","offer_id":40234333864003,"sku":"5835","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E100-1104 - Superseded","offer_id":40234333896771,"sku":"7175","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E100-0302E-EN - Superseded","offer_id":40234333929539,"sku":"8794","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E100-0302-EN - Superseded","offer_id":40234333962307,"sku":"8793","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E100-1101 - Superseded","offer_id":40234333995075,"sku":"8283","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E100-0200 - Superseded","offer_id":40234334027843,"sku":"8282","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_90fe53f9-37fb-418f-865c-a8cf6d9fd1ed.png?v=1776702342","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e10000-semi-e100-specification-for-a-reticle-smif-pod-rsp-used-to-transport-and-store-6-inch-or-230-mm-reticles","provider":"SEMI Dev 2","version":"1.0","type":"link"}