{"product_id":"e09800-semi-e98-provisional-standard-for-the-object-based-equipment-model-obem","title":"E09800 - SEMI E98 - Provisional Standard for the Object-Based Equipment Model (OBEM)","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003ePurposes of the Object-Based Equipment Model include the following:\u003c\/font\u003e\u003c\/p\u003e \u003cul\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\n\u003cli\u003e\n\u003cfont face=\"arial\" size=\"2\"\u003eDefine a standard model for interfacing to multi-process equipment and other complex equipment. \u003c\/font\u003e\u003cp\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e \u003c\/li\u003e\n\u003cli\u003e\n\u003cfont face=\"arial\" size=\"2\"\u003eDefine standard equipment components so that communications can \"discuss\" component-related issues. \u003c\/font\u003e\u003cp\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e \u003c\/li\u003e\n\u003cli\u003e\n\u003cfont face=\"arial\" size=\"2\"\u003eProvide an equipment model that can be easily integrated with SEMI E81 CIM Framework systems by connecting an OBEM-compliant equipment to a Machine object. \u003c\/font\u003e\u003cp\u003e\u003c\/p\u003e \u003c\/li\u003e\n\u003c\/ul\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eThe purpose of the Object-Based Equipment Model (OBEM) standard is to provide definitions, services, and behavior, as seen through communications with the factory, for the common types of physical and logical objects of which equipment is typically composed, including the equipment itself. The definition of standardized objects allows the equipment to describe its makeup to the factory and provides the factory visibility into the equipment.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eThis is a provisional standard that defines concepts, behavior, and services to support the integration of production equipment within a semiconductor factory. The scope of this standard includes all semiconductor manufacturing equipment that provides an interface to the factory host systems. Some services may not be applicable to some material handling systems.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eSections that must be completed in order for the provisional status of OBEM to be removed include the following:\u003c\/font\u003e\u003c\/p\u003e \u003col\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e \u003c\/p\u003e\n\u003cli\u003e\n\u003cfont face=\"arial\" size=\"2\"\u003e§ 11.2 — Access Management \u003c\/font\u003e\u003cp\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e\u003c\/p\u003e \u003c\/li\u003e\n\u003cli\u003e\n\u003cfont face=\"arial\" size=\"2\"\u003e§ 14 — OBEM Compliance \u003c\/font\u003e\u003cp\u003e\u003c\/p\u003e \u003c\/li\u003e\n\u003c\/ol\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eDetail standards will also be added in the future to specify OBEM mappings to different protocols such as SECS-II, CORBA IDL, and DCOM.\u003c\/font\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e\u003c\/p\u003e \u003cp\u003e \u003c\/p\u003e \u003cp\u003e\u003cfont size=\"2\" face=\"arial\"\u003eSubordinate Standard: \u003c\/font\u003e\u003c\/p\u003e\u003cfont size=\"2\"\u003e\u003cfont face=\"arial\"\u003e \u003c\/font\u003e\u003cp style=\"\"\u003e\u003cfont size=\"2\" face=\"arial\"\u003eSEMI E98.1-1102 (Reapproved 0309) - Provisional Specification for SECS-II Protocol for the Object-Based Equipment Model \u003c\/font\u003e\u003c\/p\u003e\n\u003cp style=\"\"\u003e\u003cfont size=\"2\" face=\"arial\"\u003e\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\" style=\"\"\u003e\u003cfont size=\"2\" face=\"arial\"\u003e \u003c\/font\u003e\u003c\/p\u003e\n\u003cfont size=\"2\" style=\"\"\u003e\u003cfont face=\"arial\"\u003e\u003cb style=\"\"\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003c\/font\u003e\u003cp style=\"\"\u003e\u003cfont face=\"arial\"\u003eSEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)\u003cbr\u003eSEMI E10 — Standard for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM)\u003cbr\u003eSEMI E15 — Specification for Tool Load Port\u003cbr\u003eSEMI E15.1 — Provisional Specification for 300 mm Tool Load Port\u003cbr\u003eSEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)\u003cbr\u003eSEMI E39 — Object Services Standard: Concepts, Behavior, and Services\u003cbr\u003eSEMI E40 — Standard for Processing Management\u003cbr\u003eSEMI E41 — Exception Management (EM) Standard \u003cbr\u003eSEMI E42 — Recipe Management Standard: Concepts, Behavior, and Message Services \u003cbr\u003eSEMI E53 — Event Reporting\u003cbr\u003eSEMI E54 — Sensor\/Actuator Network Standard\u003cbr\u003eSEMI E58 — Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services\u003cbr\u003eSEMI E81 — Provisional Specification for CIM Framework Domain Architecture\u003cbr\u003eSEMI E87 — Specification for Carrier Management (CMS)\u003cbr\u003eSEMI E90 — Specification for Substrate Tracking \u003cbr\u003eSEMI E94 — Specification for Control Job Management \u003c\/font\u003e\u003cbr\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e","brand":"semi.org","offers":[{"title":"SEMI E98-0309 - Inactive","offer_id":40234340843587,"sku":"5926","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E98-1106 - Superseded","offer_id":40234340974659,"sku":"7466","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E98-1102 - Superseded","offer_id":40234341105731,"sku":"7465","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_S_656dc0fe-4193-4e7f-b593-172030d5ce10.png?v=1776702268","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e09800-semi-e98-provisional-standard-for-the-object-based-equipment-model-obem","provider":"SEMI Dev 2","version":"1.0","type":"link"}