{"product_id":"e09200-semi-e92-specification-for-300-mm-light-weight-and-compact-box-opener-loader-to-tool-interoperability-standard-bolts-light","title":"E09200 - SEMI E92 - Specification for 300 mm Light Weight and Compact Box Opener\/Loader to Tool-Interoperability Standard (Bolts\/Light)","description":"\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eThis Standard is intended to provide an appropriate level of specification that ensures modularity and interchangeability at all mechanical interfaces between the component that opens the boxes and presents the boxes to the equipment wafer handler for unloading and loading 300 mm wafers (BOLTS\/Light unit) and higher level part of equipment.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eThis Standard is also intended to ensure a high level of interchangeability and interoperability by setting additional specifications for some of the box opener\/loader’s functions that affect interoperability (refer to Figure 1).\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eBy setting specification for both the mechanical interface and functions of Box opener\/loader, this Standard is intended to achieve\u003c\/span\u003e\u003c\/p\u003e\u003cul\u003e\n\u003cli\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eHigh level of interchangeability\/interoperability,\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eQuick attachment\/detachment capability with high mechanical repeatability,\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eLight weight, and\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eCompactness.\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003ci\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eItems Specified\u003c\/span\u003e\u003c\/i\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003e — This Standard is intended to set an appropriate level of specification that are necessary for while ensuring modularity, interchangeability, and interoperability, including:\u003c\/span\u003e\u003c\/p\u003e\u003cul\u003e\n\u003cli\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eMechanical interface features between the box opener\/loader and equipment\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eBox opener\/loader functions that affect interoperability.\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003ci\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eUsage of This Standard\u003c\/span\u003e\u003c\/i\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003e — Interoperability specifications defined by this Standard are intended to be used as interfaces and functionality between BOLTS\/Light compliant box opener\/loader and:\u003c\/span\u003e\u003c\/p\u003e\u003cul\u003e\n\u003cli\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eA BOLTS-M compliant load port unit (that would conform to SEMI E63).\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eAn integrated load port such as four box opener\/loader in one chassis.\u003c\/span\u003e\u003c\/li\u003e\n\u003cli\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eHigh-densely packaged equipment that uses the space under the box opener\/loader.\u003c\/span\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI Standards Compatibility — This Standard is compatible with 300 mm SEMI Standards including SEMI E15.1, SEMI E47.1, SEMI E1.9, SEMI E62, SEMI E63, and SEMI E64.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eOpen Cassette Application — The BOLTS\/Light unit can be configured to handle boxes that would conform to SEMI E47.1 and SEMI E62.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eA similar unit without the box opening function may be compatibly designed to facilitate placement of an open cassette (e.g., a cassette that conforms to SEMI E1.9).\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eCarrier Capacities — This Standard defines one interface for 13 or 25 carrier capacity box opener\/loader.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eThe interface specified in this Standard is designed for equipment with a sealed minienvironment, but it is not limited to such.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E15 — Specification for Tool Load Port\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E15.1 — Specification for 300 mm Tool Load Port\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E47.1 — Mechanical Specification for FOUPS Used to Transport and Store 300 mm Wafers\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E57 — Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E62 — Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E63 — Mechanical Specification for 300 mm Box Opener\/Loader to Tool Standard (BOLTS-M) Interface\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E64 — Specification for 300 mm Cart to SEMI E15.1 Docking Interface Port\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E92-0523 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E92-0302E (Reapproved 0615)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E92-0302E (Reapproved 0709)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E92-0302E (editorial revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E92-0302 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E92-0200E (editorial revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E92-0200 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E92-0999 (first published)\u003c\/span\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E92-0523 - Current","offer_id":43106897166403,"sku":"16527","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E92-0302E (Reapproved 0615) - Superseded","offer_id":43106897199171,"sku":"3866","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E92-0302E (Reapproved 0709) - Superseded","offer_id":40234269474883,"sku":"7492","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E92-0302E - Superseded","offer_id":40234269507651,"sku":"7454","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_39fc7a6f-dbcf-4a58-8daf-4271af610723.png?v=1776702775","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e09200-semi-e92-specification-for-300-mm-light-weight-and-compact-box-opener-loader-to-tool-interoperability-standard-bolts-light","provider":"SEMI Dev 2","version":"1.0","type":"link"}