{"product_id":"e09100-semi-e91-specification-for-prober-specific-equipment-model-psem","title":"E09100 - SEMI E91 - Specification for Prober Specific Equipment Model (PSEM)","description":"\u003cp\u003e\u003cspan class=\"cf0\"\u003e*This Safety Guideline has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is official and authoritative version.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan class=\"cf2\"\u003e\u003cstrong\u003e1 Purpose\u003c\/strong\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan class=\"cf0\"\u003e1.1 This Document establishes a Specific Equipment Model for prober equipment (PSEM). The PSEM consists of equipment characteristics and behaviors that apply to this class of equipment and are required to be implemented in addition to the fundamental requirements and additional capabilities specified in SEMI E30 (GEM). The intent of this Document is to facilitate the integration of prober equipment into an automated semiconductor factory. This Document accomplishes this by defining an operational model for prober equipment as viewed by a factory automation controller. This definition provides a standard host interface and equipment operational behavior.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan class=\"cf2\"\u003e\u003cstrong\u003e2 Scope\u003c\/strong\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan class=\"cf0\"\u003e2.1 The scope of this Document is limited to the definition of prober equipment behavior as perceived by a Semiconductor Equipment Communications Standard (SECS-II) (SEMI E5) host that complies with GEM. The Document defines the view of the equipment through the SECS communications link, but does not define the internal operation of the equipment. It includes a specific processing state model as the basis for the behavior of all equipment of this class.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan class=\"cf0\"\u003e2.2 This Document requires that the GEM fundamental requirements and applicable additional capabilities have been implemented on the prober equipment. This Document expands GEM Standard requirements and capabilities in the areas of the processing state model, collection events, remote commands, variable data items and process program management, and adds Prober Job state model to GEM Standard requirements and capabilities. This Document does not include the definition of the treatment of Multiple Stage.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan class=\"cf0\"\u003e2.3 This Document applies to the class of prober equipment in which the wafer is unloaded from the same slot in the same carrier which loaded the wafer after processing.\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan class=\"cf2\"\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan class=\"cf0\"\u003eSEMI E5 \u003c\/span\u003e\u003cspan class=\"cf3\"\u003e— Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan class=\"cf3\"\u003eSEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan class=\"cf3\"\u003eSEMI M20 — Practice for Establishing a Wafer Coordinate System\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e\u003cspan class=\"cf3\"\u003eSEMI M21 — Guide for Assigning Addresses to Rectangular Elements in a Cartesian Array\u003c\/span\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E91-0725 - Current","offer_id":43106897231939,"sku":"18665","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E91-0725 - Current + Redline","offer_id":43106897264707,"sku":"18667","price":38900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E91-1217 - Superseded","offer_id":43106897297475,"sku":"3865","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E91-0600 (Reapproved 1109) - Superseded","offer_id":40234248077379,"sku":"7519","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E91-0600 - Superseded","offer_id":40234248142915,"sku":"7453","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_S_19adbabc-a1a0-42cf-b054-71310d4aa299.png?v=1776702776","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e09100-semi-e91-specification-for-prober-specific-equipment-model-psem","provider":"SEMI Dev 2","version":"1.0","type":"link"}