{"product_id":"e09000-semi-e90-specification-for-substrate-tracking","title":"E09000 - SEMI E90 - Specification for Substrate Tracking","description":"\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003e* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version.\u003c\/strong\u003e\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e1  Purpose\u003cbr\u003e1.1  The purpose of this Specification is to provide the standard services of equipment to track substrates (manufactured product) in manufacturing equipment. This Specification defines the concepts and behaviors for the information management of substrates, as well as the messages\/services.\u003cbr\u003e2  Scope\u003cbr\u003e2.1  Essentially, information about substrates are managed by the factory system, while the equipment is required to provide the services for the substrate information management. This Specification addresses the requirement for the equipment services to manage information of substrates that reside in the equipment.\u003cbr\u003e2.2  The scope of this Specification is to define the information services of equipment that can be requested by the user. To clarify required services, the concepts and behaviors of the substrate, the substrate location, the batch and the batch location are defined.\u003cbr\u003e2.3  This Specification is applicable to any manufacturing equipment that handles substrates. To implement these services, the equipment and factory system are integrated by means of a communication link.\u003cbr\u003e\u003cstrong\u003eNOTICE:\u003c\/strong\u003e SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.\u003c\/p\u003e\u003cp\u003e\u003cbr\u003eSubordinate Standards (included)\u003cbr\u003eSEMI E90.1-1125 — Specification for SECS-II Protocol Substrate Tracking\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003cbr\u003eSEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)\u003cbr\u003eSEMI E39 — Specification for Object Services: Concepts, Behavior, and Services\u003cbr\u003eSEMI E172 — Specification for SECS Equipment Data Dictionary (SEDD)\u003cbr\u003e\u003cstrong\u003eNOTICE:\u003c\/strong\u003e Unless otherwise indicated, all documents cited shall be the latest published versions.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI E90-1125 (technical revision)\u003cbr\u003eSEMI E90-1224 (technical revision)\u003cbr\u003eSEMI E90-0624 (technical revision)\u003cbr\u003eSEMI E90-0921 (designation update)\u003cbr\u003eSEMI E90-0312 (Reapproved 1218)\u003cbr\u003eSEMI E90-0312 (technical revision)\u003cbr\u003eSEMI E90-1111 (designation update)\u003cbr\u003eSEMI E90-0707 (technical revision)\u003cbr\u003eSEMI E90-0706 (technical revision)\u003cbr\u003eSEMI E90-0306 (technical revision)\u003cbr\u003eSEMI E90-1105 (technical revision)\u003cbr\u003eSEMI E90-0705 (technical revision)\u003cbr\u003eSEMI E90-1104E2 (editorial revision)\u003cbr\u003eSEMI E90-1104E (editorial revision)\u003cbr\u003eSEMI E90-1104 (technical revision)\u003cbr\u003eSEMI E90-0304 (technical revision)\u003cbr\u003eSEMI E90-0703 (technical revision)\u003cbr\u003eSEMI E90-0303 (technical revision)\u003cbr\u003eSEMI E90-1102 (technical revision)\u003cbr\u003eSEMI E90-0702 (technical revision)\u003cbr\u003eSEMI E90-0302 (technical revision)\u003cbr\u003eSEMI E90-1101 (technical revision)\u003cbr\u003eSEMI E90-0701 (technical revision)\u003cbr\u003eSEMI E90-0301 (technical revision)\u003cbr\u003eSEMI E90-1000 (technical revision)\u003cbr\u003eSEMI E90-0600 (technical revision)\u003cbr\u003eSEMI E90-0200 (technical revision)\u003cbr\u003eSEMI E90-0999 (first published)\u003c\/p\u003e\u003cp\u003e\u003cbr\u003eSEMI E90.1-1125 (technical revision)\u003cbr\u003eSEMI E90.1-1224 (technical revision)\u003cbr\u003eSEMI E90.1-0624 (technical revision)\u003cbr\u003eSEMI E90.1-0312 (Reapproved 0921)\u003cbr\u003eSEMI E90.1-0312 (technical revision)\u003cbr\u003eSEMI E90.1-1111 (technical revision)\u003cbr\u003eSEMI E90.1-0706 (technical revision)\u003cbr\u003eSEMI E90.1-0705 (technical revision)\u003cbr\u003eSEMI E90.1-1104 (technical revision)\u003cbr\u003eSEMI E90.1-0703 (technical revision)\u003cbr\u003eSEMI E90.1-0303 (technical revision)\u003cbr\u003eSEMI E90.1-1102 (technical revision)\u003cbr\u003eSEMI E90.1-0702 (technical revision)\u003cbr\u003eSEMI E90.1-0701 (technical revision)\u003cbr\u003eSEMI E90.1-0301 (first published)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E90-1125 - 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