{"product_id":"e07700-semi-e77-test-method-for-calculation-of-conversion-factors-for-a-mass-flow-controller-using-surrogate-gases","title":"E07700 - SEMI E77 - Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate Gases","description":"\u003cp\u003e \u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eThe purpose of this Test Method is to quantify a nominal average conversion factor from one gas to another for a mass flow controller (MFC) and to quantify the conversion factor as function of flow for an MFC.\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e \u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eThis procedure describes a method to determine the MFC conversion factor and function between two gases.\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e \u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eThis Standard provides a common basis for communication between manufacturers and users.\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e \u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eThe intent of this Standard is not to suggest any specific testing program, but to specify the test method to be used when testing for parameters covered by this Test Method. Reference operating conditions represent the environmental conditions where the ‘best’ performance can be expected.\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e \u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eNone.\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e \u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E77-0423 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E77-1104 (Reapproved 0815)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E77-1104 (Reapproved 0710)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E77-1104 (technical revision)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E77-0998 (first published)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E77-0423 - Current","offer_id":43106898247747,"sku":"16494","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E77-1104 (Reapproved 0815) - Superseded","offer_id":43106898280515,"sku":"3852","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E77-1104 (Reapproved 0710) - Superseded","offer_id":40234264264771,"sku":"7605","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E77-1104 - Superseded","offer_id":40234264363075,"sku":"7405","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_91859de9-75e2-4654-93b2-9fd6e51bae68.png?v=1776702792","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e07700-semi-e77-test-method-for-calculation-of-conversion-factors-for-a-mass-flow-controller-using-surrogate-gases","provider":"SEMI Dev 2","version":"1.0","type":"link"}