{"product_id":"e07300-semi-e73-specification-for-vacuum-pump-interfaces-dry-pumps","title":"E07300 - SEMI E73 - Specification for Vacuum Pump Interfaces - Dry Pumps","description":"\u003cp class=\"StdsText\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eThis Standard specifies the physical and electrical interfaces for dry pump (DRP) type vacuum pumps. Standardization of pump interfaces will allow for interchangeability of pumps. Device manufacturers use this standard when procuring processing equipment to specify to the equipment supplier the interface required for interchangeability of pumps. This Document is also used by semiconductor processing equipment suppliers to specify standardized interfaces to pump suppliers.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH1\"\u003e\u003cbr\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eThis Standard applies to vacuum pumps supplied with 300 mm semiconductor processing equipment.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eThe Standard specifies the mechanical and electrical interfaces for dry pumps including the following.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsListBulleted\" style=\"text-indent: 0in;\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003e• Mechanical connectors\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsListBulleted\" style=\"text-indent: 0in;\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003e• Control signals and connector\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsListBulleted\" style=\"text-indent: 0in;\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003e• Power supply and connector\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsH2\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003eFigure 1 shows the scope of the standardized interface.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"StdsText\"\u003e\u003cspan style=\"font-family: Arial, sans-serif;\"\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cfont face=\"arial\" size=\"2\"\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003c\/font\u003e\u003cp\u003e\u003cfont face=\"arial\" size=\"2\"\u003eSEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment\u003c\/font\u003e\u003cbr\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E73-0301 (Reapproved 0413) - Inactive","offer_id":40234317152323,"sku":"5909","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E73-0301 (Reapproved 0307) - Superseded","offer_id":40234317250627,"sku":"7401","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E73-0301 - Superseded","offer_id":40234317381699,"sku":"7400","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_963263ff-8dac-4a95-8b10-f83c5bed4d26.png?v=1776702279","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e07300-semi-e73-specification-for-vacuum-pump-interfaces-dry-pumps","provider":"SEMI Dev 2","version":"1.0","type":"link"}