{"product_id":"e06600-semi-e66-test-method-for-determining-particle-contribution-by-mass-flow-controllers","title":"E06600 - SEMI E66 - Test Method for Determining Particle Contribution by Mass Flow Controllers","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 2016. Available at www.semiviews.org and www.semi.org in May 2017; originally published September 1997; previously published June 2011.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe purpose of this Test Method is to measure particle contribution by mass flow controllers (MFCs) intended for use in high-purity gas systems.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis Document describes a test method that yields statistically significant comparisons of particle contribution among mass flow controllers under test conditions.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis Test Method defines a procedure for testing MFCs intended for installation into a high-purity gas systems. It is intended for use by manufacturers and end users.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003eSEMI E29 — Terminology for the Calibration of Mass Flow Controllers and Mass Flow Meters\u003cbr\u003e SEMI F1 — Specification for Leak Integrity of High-Purity Gas Piping Systems and Components\u003cbr\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E66-0611 (Reapproved 0517) - Current","offer_id":40234270097475,"sku":"3844","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E66-0611 - Superseded","offer_id":40234270163011,"sku":"7650","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E66-1103 - Superseded","offer_id":40234270261315,"sku":"7393","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_7baa86b0-4957-4a66-aada-51828af3f99f.png?v=1776702799","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e06600-semi-e66-test-method-for-determining-particle-contribution-by-mass-flow-controllers","provider":"SEMI Dev 2","version":"1.0","type":"link"}