{"product_id":"e06300-semi-e63-300-mmボックスオープナ-ローダーと装置間のスタンダードbolts-mインタフェースの機械的仕様","title":"E06300 - SEMI E63 - 300 mmボックスオープナ／ローダーと装置間のスタンダード（BOLTS-M）インタフェースの機械的仕様","description":"\u003cp class=\"Indent\" style=\"MARGIN: 0in 21pt 0pt\"\u003e\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial\"\u003e本スタンダードは，\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: Arial\"\u003eglobal Physical Interfaces \u0026amp; Carriers Committee\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial\"\u003eで技術的に承認されている。現版は\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: Arial\"\u003e2010\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial\"\u003e年\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: Arial\"\u003e8\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial\"\u003e月\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: Arial\"\u003e27\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial\"\u003e日，\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: Arial\"\u003eglobal Audits and Reviews Subcommittee\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial\"\u003eにて発行が承認された。\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: Arial; mso-fareast-language: JA\"\u003e2010\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial; mso-fareast-language: JA\"\u003e年\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: Arial; mso-fareast-language: JA\"\u003e10\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial; mso-fareast-language: JA\"\u003e月に\u003cspan style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: Arial; mso-fareast-language: JA\"\u003e www.semi.org\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; COLOR: black; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial; mso-fareast-language: JA\"\u003eで入手可能となる。\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial; mso-fareast-language: JA\"\u003e初版は\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: Arial; mso-fareast-language: JA\"\u003e1997\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial; mso-fareast-language: JA\"\u003e年に発行，前版は\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: Arial; mso-fareast-language: JA\"\u003e2004\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial; mso-fareast-language: JA\"\u003e年\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: Arial; mso-fareast-language: JA\"\u003e11\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial; mso-fareast-language: JA\"\u003e月に発行された。\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: Arial; mso-fareast-language: JA\"\u003e\u003c?xml:namespace prefix = o ns = \"urn:schemas-microsoft-com:office:office\" \/\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/p\u003e \u003cp class=\"MsoNormal\" style=\"MARGIN: 0in 0in 0pt\"\u003e\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: Arial\"\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \u003ch2 style=\"MARGIN: 3pt 0in; mso-list: none\"\u003e\u003cfont size=\"2\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial; mso-fareast-language: JA\"\u003e本スタンダードは，プロセス装置または測定装置においてボックスを開け，\u003cspan style=\"FONT-FAMILY: Arial; mso-fareast-language: JA\"\u003e300 mm\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial; mso-fareast-language: JA\"\u003eウェーハのアンロードおよびロードのためにウェーハハンドラにウェーハを渡すための装置側の機械的インタフェースを規定する。ボックスオープナとローダーユニットは\u003cspan style=\"FONT-FAMILY: Arial; mso-fareast-language: JA\"\u003e1\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial; mso-fareast-language: JA\"\u003eつ以上の（\u003cspan style=\"FONT-FAMILY: Arial; mso-fareast-language: JA\"\u003eSEMI E15.1\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial; mso-fareast-language: JA\"\u003eに準拠した）ロードポートを有すると共に，空容器あるいは（装置のスループットを上げるための）待ちロット用のストッカーを有することもある。ボックスオープナ／ローダーユニットは（\u003cspan style=\"FONT-FAMILY: Arial; mso-fareast-language: JA\"\u003eSEMI E47.1, SEMI E62\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial; mso-fareast-language: JA\"\u003eに準拠した）ボックスあるいはポッドを扱うだけでなく（\u003cspan style=\"FONT-FAMILY: Arial; mso-fareast-language: JA\"\u003eSEMI E1.9\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial; mso-fareast-language: JA\"\u003eに準拠した）オープンカセットを扱う。本スタンダードはそれらの種類ならびにキャリア容量（\u003cspan style=\"FONT-FAMILY: Arial; mso-fareast-language: JA\"\u003e13\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial; mso-fareast-language: JA\"\u003e枚と\u003cspan style=\"FONT-FAMILY: Arial; mso-fareast-language: JA\"\u003e25\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: Arial; mso-hansi-font-family: Arial; mso-bidi-font-family: Arial; mso-fareast-language: JA\"\u003e枚の）をひとつのインタフェース規格によって規定する。\u003cspan style=\"FONT-FAMILY: Arial; mso-fareast-language: JA\"\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/h2\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eSEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers \u003cbr\u003eSEMI E15 — Specification for Tool Load Port \u003cbr\u003eSEMI E15.1 — Specification for 300 mm Tool Load Port \u003cbr\u003eSEMI E19 — Standard Mechanical Interface (SMIF) \u003cbr\u003eSEMI E47.1 — Mechanical Specification for FOUPS Used to Transport and Store 300 mm Wafers \u003cbr\u003eSEMI E57 — Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers \u003cbr\u003eSEMI E62 — Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS) \u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E63-1104 (Reapproved 1110) - Superseded","offer_id":40234262331459,"sku":"3843","price":38100.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_39cb1250-47e0-42a1-af27-574d44d9cd8d.png?v=1776702800","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e06300-semi-e63-300-mm%e3%83%9c%e3%83%83%e3%82%af%e3%82%b9%e3%82%aa%e3%83%bc%e3%83%97%e3%83%8a-%e3%83%ad%e3%83%bc%e3%83%80%e3%83%bc%e3%81%a8%e8%a3%85%e7%bd%ae%e9%96%93%e3%81%ae%e3%82%b9%e3%82%bf%e3%83%b3%e3%83%80%e3%83%bc%e3%83%89bolts-m%e3%82%a4%e3%83%b3%e3%82%bf%e3%83%95%e3%82%a7%e3%83%bc%e3%82%b9%e3%81%ae%e6%a9%9f%e6%a2%b0%e7%9a%84%e4%bb%95%e6%a7%98","provider":"SEMI Dev 2","version":"1.0","type":"link"}