{"product_id":"e05700-semi-e57-specification-for-kinematic-couplings-used-to-align-and-support-300-mm-wafer-carriers","title":"E05700 - SEMI E57 - Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers","description":"\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard was technically approved by the Physical Interfaces \u0026amp; Carriers Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 11, 2016. Available at www.semiviews.org and www.semi.org in June 2016; originally published in 1996; previously published November 2010.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard specifies the mechanical couplings used to ergonomically align and precisely support 300 mm wafer carriers (including transport cassettes, process cassettes, quartz boats, pods, lot boxes, and shipping boxes). Such a kinematic coupling can be used at several interfaces, including:\u003c\/p\u003e \u003cul\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\n\u003cli\u003ebetween a box or cassette and a tool load-port or vehicle nest,\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\n\u003cli\u003ebetween a transport cassette and a box, and\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\n\u003cli\u003ebetween a process cassette or quartz boat and the floor of a process chamber.\u003c\/li\u003e \u003cp\u003e\u003c\/p\u003e\n\u003c\/ul\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and interchangeability at all mechanical interfaces. Only the bottom half of the kinematic coupling is specified so that suppliers can be flexible in designing wafer carriers that can mate with it.\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\n\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003eSEMI E15 — Specification for Tool Load Port\u003cbr\u003e SEMI E19 — Standard Mechanical Interface (SMIF)\u003cbr\u003e SEMI E19.4 — 200 mm Standard Mechanical Interface (SMIF)\u003cbr\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e","brand":"semi.org","offers":[{"title":"SEMI E57-0616 - Inactive","offer_id":43106898444355,"sku":"3839","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E57-0600 (Reapproved 1110) - Superseded","offer_id":40234258726979,"sku":"7625","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E57-0600E2 (Reapproved 0305) - Superseded","offer_id":40234258792515,"sku":"7382","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E57-0600E2 - Superseded","offer_id":40234258858051,"sku":"7381","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E57-0600 - Superseded","offer_id":40234258923587,"sku":"7488","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_fcd2b302-cd68-42cb-9d12-fcb6e1efa6f7.png?v=1776702803","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e05700-semi-e57-specification-for-kinematic-couplings-used-to-align-and-support-300-mm-wafer-carriers","provider":"SEMI Dev 2","version":"1.0","type":"link"}