{"product_id":"e05421-semi-e54-21-specification-for-sensor-actuator-network-for-motionnet-communication","title":"E05421 - SEMI E54.21 - Specification for Sensor Actuator Network for Motionnet Communication","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cspan style=\"font-family: arial; font-size: small;\"\u003eThis Document defines a communication specification based on the MOTIONNET® protocol to enable communications between intelligent devices on a Sensor\/Actuator Network (SAN) that operate according to SEMI E54 device models on semiconductor manufacturing equipment.\u003c\/span\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eThis Document gives interoperability with SEMI E54 common\/specific device model based Sensor\/Actuator devices.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eThis Document specifies how Sensor\/Actuator\/Controller devices interoperate on the network specific for the MOTIONNET Public specification referenced in the § 4, as a part of equipment’s control system.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eThis Document defines relation with main part of SEMI E54 including Common Device Model (CDM) and existing Specific Device Models (SDMs). This Document is to be used with the CDM and one or more SDMs, as well as the MOTIONNET Public Specification.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e\u003cfont face=\"arial\" size=\"2\"\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003c\/font\u003e\u003cp\u003e\u003cfont face=\"arial\" size=\"2\"\u003eSEMI E54 — Specification for Sensor\/Actuator Network\u003cbr\u003e SEMI E54.1 — Specification for Sensor\/Actuator Network Common Device Model\u003cbr\u003e SEMI E54.3 — Specification for Sensor\/Actuator Network Specific Device Model for Mass Flow Device\u003cbr\u003e SEMI E54.10 — Specification for Sensor\/Actuator Network Specific Device Model for an In Situ Particle Monitor Device\u003cbr\u003e SEMI E54.11 — Specification for Sensor\/Actuator Network Specific Device Model for Endpoint Devices\u003cbr\u003e SEMI E54.18 — Specification for Sensor\/Actuator Specific Device Model for Vacuum Pump Device\u003cbr\u003e\u003c\/font\u003e\u003cbr\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E54.21-1019 - Inactive","offer_id":43106898608195,"sku":"13593","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E54.21-1110 (Reapproved 0517) - Superseded","offer_id":40234251124803,"sku":"3828","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E54.21-1110 - Superseded","offer_id":40234251157571,"sku":"7624","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_S_8fd05a2e-c35b-4001-8625-5e3615296e5d.png?v=1776702811","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e05421-semi-e54-21-specification-for-sensor-actuator-network-for-motionnet-communication","provider":"SEMI Dev 2","version":"1.0","type":"link"}