{"product_id":"e05416-semi-e54-16-specification-for-sensor-actuator-network-communications-for-lonworks","title":"E05416 - SEMI E54.16 - Specification for Sensor\/Actuator Network Communications for LonWorks","description":"\u003cp class=\"StdsText\" style=\"MARGIN:;\"\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eNOTICE:\u003c\/strong\u003e This Standard was balloted and approved for withdrawal in 2024.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003eThis Specification defines a communication specification based on the ANSI\/EIA\/CEA 709.1 Control Networking Protocol (LonWorks) to enable communications between intelligent devices on a sensor\/actuator network (SAN) that operate in accordance with SEMI-specified device models (common and device specific) on semiconductor manufacturing equipment.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003eThis Standard specifies a mapping of the SEMI Common Device Model (CDM) onto LonWorks technology using the LonMark interoperability guidelines established for LonWorks devices. The LonMark International Association will review and approve the enhanced SEMI LonMark functional profiles presented in this network communication Document and incorporate the required SEMI profiles into the LonMark Interoperability Guidelines.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards \u003c\/strong\u003e(purchase separately)\u003cbr\u003eSEMI E54.1 — Standard for Sensor\/Actuator Network Common Device Model\u003cbr\u003eSEMI E54.3 — Specification for Sensor\/Actuator Network Specific Device Model for Mass Flow Device\u003cbr\u003eSEMI E54.10 — Specification for Sensor\/Actuator Network Specific Device Model for an In Situ Particle Monitor Device\u003cbr\u003eSEMI E54.11 — Specification for Sensor\/Actuator Specific Device Model for an Endpoint Device\u003cbr\u003eSEMI E54.18 — Specification for Sensor\/Actuator Network Specific Device Model for Vacuum Pump Device\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI E54.16-1106 (Withdrawn 0524)\u003cbr\u003eSEMI E54.16-1106 (Reapproved 1211)\u003cbr\u003eSEMI E54.16-1106 (technical revision)\u003cbr\u003eSEMI E54.16-0705 (first published - replaces SEMI E54.6)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E54.16-1106 (Withdrawn 0524) - Withdrawn","offer_id":43106883338307,"sku":"17579","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E54.16-1106 (Reapproved 1211) - Superseded","offer_id":43106883371075,"sku":"5898","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E54.16-1106 - Superseded","offer_id":40234313220163,"sku":"7371","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_S_106e5784-4ff3-43a5-91f8-78b956f4ab77.png?v=1776702289","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e05416-semi-e54-16-specification-for-sensor-actuator-network-communications-for-lonworks","provider":"SEMI Dev 2","version":"1.0","type":"link"}