{"product_id":"e05415-semi-e54-15-sensor-actuator-network-communication-specification-for-safetybus-p","title":"E05415 - SEMI E54.15 - Specification for Sensor\/Actuator Network Communications for SafetyBUS p","description":"\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eNOTICE:\u003c\/strong\u003e This Standard was balloted and approved for withdrawal in 2024.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003eThis Standard defines a communication specification based on the SafetyBUS p protocol to enable communications between intelligent devices on a sensor\/actuator network (SAN) that operate according to SEMI specified device models (common and device specific) in a semiconductor manufacturing equipment.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003eThis Standard specifies the protocol and services that compliant intelligent devices shall support to exchange information over the SafetyBUS p semiconductor equipment sensor\/actuator network.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003eThis Standard specifies the utilization of the SafetyBUS p protocol to present externally visible device structure and behavior, specified in the Common Device Model (CDM) and appropriate Specific Device Models (SDMs), on a SafetyBUS p network.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003eThis Standard is used in conjunction with a SEMI Standard SAN Common Device Model Specification, one or more SEMI Standard Specific Device Model (SDM) Specifications (e.g., for a mass flow device), the SafetyBUS p Object Communications Specification Reference Guide. Together, they describe the SafetyBUS p protocol, the externally visible data structures and behaviors of devices utilizing the SafetyBUS p networking capability in a SEMI compliant SAN system.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003cbr\u003eSEMI E54.1 — Standard for Sensor\/Actuator Network Common Device Model\u003cbr\u003eSEMI E54.3 — Specification for Sensor\/Actuator Network Specific Device Model for Mass Flow Device\u003cbr\u003eSEMI E54.10 — Specification for Sensor\/Actuator Network Specific Device Model for an In-Situ Particle Monitor Device\u003cbr\u003eSEMI E54.11 — Specification for Sensor\/Actuator Network Specific Device Model for an Endpoint Device\u003cbr\u003eSEMI E54.18 — Specification for Sensor\/Actuator Network Specific Device Model for Vacuum Pump Device\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI E54.15-1107 (Withdrawn 0524)\u003cbr\u003eSEMI E54.15-1107 (technical revision)\u003cbr\u003eSEMI E54.15-0706 (technical revision)\u003cbr\u003eSEMI E54.15-0305 (first published)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E54.15-1107 (Withdrawn 0524) - Withdrawn","offer_id":43106883502147,"sku":"17578","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E54.15-1107 - Superseded","offer_id":43106883534915,"sku":"5895","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_S_28eda2f6-c693-4098-a4ce-6d9115563aab.png?v=1776702291","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e05415-semi-e54-15-sensor-actuator-network-communication-specification-for-safetybus-p","provider":"SEMI Dev 2","version":"1.0","type":"link"}