{"product_id":"e05411-semi-e54-11-specification-for-sensor-actuator-network-specific-device-model-for-endpoint-devices","title":"E05411 - SEMI E54.11 - Specification for Sensor\/Actuator Network Specific Device Model for Endpoint Devices","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cbr\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family: \n \n \"Arial\",sans-serif'\u003e\u003cb\u003eNOTICE:\u003c\/b\u003e This Document is no longer published with the SEMI \n \n E54 suite of Standards. It is published and sold separately.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \n \n  \n \n \u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family: \n \n \"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \n \n  \n \n \u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family: \n \n \"Arial\",sans-serif'\u003eThis Specification is part of a suite of Standards that \n \n specify the implementation of SEMI Standards for the Sensor\/Actuator Network. \n \n The specific purpose of this Specification is to describe a network independent \n \n application model comprised of device objects that are common to all endpoint \n \n devices (EPD) on a semiconductor equipment Sensor\/Actuator Communication Network.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \n \n  \n \n \u003cp class=\"MsoNormal\"\u003e\u003cbr\u003e\u003c\/p\u003e \n \n  \n \n \u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family: \n \n \"Arial\",sans-serif'\u003eAn EPD is a device that measures and monitors process \n \n characteristics to determine when a specific threshold or event has been \n \n obtained usually to signal the completion of a process or process step. These \n \n EPDs are, but not limited to, devices that may classify a process endpoint by \n \n determining the size and count of particles in the process environment, \n \n detecting, and determining optical light from a sample region of the \n \n environment’s space, or determining motor current of an equipment component.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \n \n  \n \n \u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family: \n \n \"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \n \n  \n \n \u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family: \n \n \"Arial\",sans-serif'\u003eThis Specification specifically addresses the minimum \n \n attributes, services, and behavior an EPD must support to be interoperable on \n \n the Sensor\/Actuator Network.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \n \n  \n \n \u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family: \n \n \"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \n \n  \n \n \u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family: \n \n \"Arial\",sans-serif'\u003eThis Specification is intended to ensure a high-degree of \n \n device interoperability on the Sensor\/Actuator Network, while still allowing \n \n flexibility for product differentiation and technology evolution.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \n \n  \n \n \u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family: \n \n \"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \n \n  \n \n \u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family: \n \n \"Arial\",sans-serif'\u003eThe model specified in this Specification is used in \n \n conjunction with the Sensor\/Actuator Network Common Device Model (CDM) to \n \n completely describe the EPD as it appears from the network interface.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \n \n  \n \n \u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family: \n \n \"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \n \n  \n \n \u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family: \n \n \"Arial\",sans-serif'\u003eThis Specification, together with the Sensor\/Actuator \n \n Network Standard, the Sensor\/Actuator Network CDM, and a Sensor\/Actuator \n \n Network Communication Specification, form a complete interoperability specification \n \n for the EPD.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \n \n  \n \n \u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family: \n \n \"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \n \n  \n \n \u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family: \n \n \"Arial\",sans-serif'\u003eTo comply with this Specification, a device must implement \n \n and support, at a minimum, the required attributes, services, and behavior \n \n identified in these documents. Support for optional attributes, services and \n \n behavior is not required to be compliant to this Specification. Optional \n \n attributes, services, and behavior are specified in these documents to promote \n \n further device interoperability as features evolve and are adopted by more \n \n manufacturers. If optional attributes, services, and behavior are implemented \n \n for this device they must be implemented as identified in this Specification.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \n \n  \n \n \u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family: \n \n \"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \n \n  \n \n \u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family: \n \n \"Arial\",sans-serif'\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e (purchase separately)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \n \n  \n \n \u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family: \n \n \"Arial\",sans-serif'\u003eSEMI E39 — Specification for Object Services: Concepts, \n \n Behavior, and Services\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \n \n  \n \n \u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family: \n \n \"Arial\",sans-serif'\u003eSEMI E54 — Specification for Sensor\/Actuator Network\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \n \n  \n \n \u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family: \n \n \"Arial\",sans-serif'\u003eSEMI E54.1 — Specification for Sensor\/Actuator Network \n \n Common Device Model\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \n \n  \n \n \u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family: \n \n \"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \n \n  \n \n \u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family: \n \n \"Arial\",sans-serif'\u003e\u003cb\u003eRevision History\u003c\/b\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \n \n  \n \n \u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family: \n \n \"Arial\",sans-serif'\u003eSEMI E54.11-0316 (Reapproved 0721)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \n \n  \n \n \u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family: \n \n \"Arial\",sans-serif'\u003eSEMI E54.11-0316 (technical revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \n \n  \n \n \u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family: \n \n \"Arial\",sans-serif'\u003eSEMI E54.11-1106 (Reapproved 1211)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \n \n  \n \n \u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family: \n \n \"Arial\",sans-serif'\u003eSEMI E54.11-1106 (technical revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \n \n  \n \n \u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family: \n \n \"Arial\",sans-serif'\u003eSEMI E54.11-1105 (technical revision)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \n \n  \n \n \u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family: \n \n \"Arial\",sans-serif'\u003eSEMI E54.11-0301 (first published)\u003c\/span\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E54.11-0316 (Reapproved 0721) - Current","offer_id":40234260529219,"sku":"14610","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E54.11-0316 - Superseded","offer_id":40234260594755,"sku":"3818","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E54.11-1106 (Reapproved 1211) - Superseded","offer_id":40234260627523,"sku":"7671","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E54.11-1106 - Superseded","offer_id":40234260758595,"sku":"7367","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_S_308dc04e-a9e8-4cba-904f-1cb4568dacf3.png?v=1776702819","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e05411-semi-e54-11-specification-for-sensor-actuator-network-specific-device-model-for-endpoint-devices","provider":"SEMI Dev 2","version":"1.0","type":"link"}