{"product_id":"e04900-semi-e49-高純度および超高純度配管システムの性能-サブアセンブリ-最終組立のためのガイド","title":"E04900 - SEMI E49 - 高純度および超高純度配管システムの性能，サブアセンブリ，最終組立のためのガイド","description":"\u003cp\u003e \u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS PMincho\"\u003e \u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eNOTICE: This translation is a REFERENCE COPY ONLY. If\ndifferences should exist between the English version and a translation in any\nother language, the English version is the official and authoritative version.\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:\nminor-fareast;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e免責事項：　この\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003eSEMI\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003eスタンダードは，投票により作成された英語版が正式なものであり，日本語版は日本の利用者各位の便宜のために作成したものです。万が一英語と日本語とに差異がある場合には英語版記載内容が優先されます｡\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;\nline-height:107%;font-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;\nmso-fareast-theme-font:minor-fareast;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003eスタンダード日本語翻訳版をご利用にあたっての注釈を本文の末尾に記載しております（「すべきである」「しなければならない」について等）。\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:\nminor-fareast;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e注意\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003e: \u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e本文書は，編集上の修正を伴い，再承認された。\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:\nminor-fareast;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e本概説スタンダードの目的は，\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003eSEMI\nE49.2\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\n\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e，\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003eSEMI\nE49.4\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\n\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e，\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003eSEMI\nE49.5\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\n\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e，\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003eSEMI\nE49.6\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\n\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e，\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003eSEMI\nE49.7\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\n\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e，\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003eSEMI\nE49.8\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\n\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e，\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003eSEMI\nE137\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\n\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003eについて一連の基本的な定義と参照文書を提供することである。\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cbr\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:\nminor-fareast;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e本文書には推奨される手法を始め性能ならびに方法の基準ついて言及する\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003eSEMI\nE49.2\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\n\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e，\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003eSEMI\nE49.4\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\n\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e，\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003eSEMI\nE49.5\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\n\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e，\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003eSEMI\nE49.6\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\n\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e，\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003eSEMI\nE49.7\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\n\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e，\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003eSEMI\nE49.8\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\n\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e，\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003eSEMI E137\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003eで使用される用語ならびに参照文書を含む。\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI E49\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;\nline-height:107%;font-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;\nmso-fareast-theme-font:minor-fareast;mso-hansi-font-family:Arial;mso-bidi-font-family:\nArial'\u003eの副文書は，配管分配システムの型式\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003e \u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e－\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003e \u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003eガス，\u003c\/span\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003eDI\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e／化学薬品，溶剤\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003e \u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e－\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003e \u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003eおよび，組立およびテスト手順の種類\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003e \u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e－\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003e \u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003eステンレススチールのためのサブアセンブリ，ポリマーのためのサブアセンブリ，そして最終的なツール組立により編成されている。最終組立は，しかるべきパラメータ（例：純度，完全性，欠陥率）すべてについて該当する\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003eSEMI\nE49\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\n\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003eの副文書に明記される通りテスト，確認されるべきである。\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:\nminor-fareast;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e本配管分配のための文書（\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003eSEMI\nE49.2 – SEMI E49.8\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:\n107%;font-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:\nminor-fareast;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e）は，システム設計，性能，材料，構成コンポーネントのためのガイドラインを含んでいる。\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003e3\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e種類の分配システムについて，それぞれ純度と性能グレードを述べる。\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eHP\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:\n107%;font-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:\nminor-fareast;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003eもしくは\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003eUHP\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003eツールの性能の最適な適用を決めるために，ユーザはツール全体の\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003eCOO\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e（\u003c\/span\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003ecost of ownership\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\"Yu Mincho\",serif;\nmso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;mso-hansi-font-family:\nArial;mso-bidi-font-family:Arial'\u003e）分析を完了させるべきである。主なパラメータに含めるべきものは，設備コストと組立サイクル時間，配管システムの信頼性と整備性要因，汚染に対するツールとサブシステム配分，ウェーハ品質とウェーハスループット要因などへの結果的な影響である。\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;\nfont-family:\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:\nminor-fareast;mso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003e最終組立は使用に伴う環境，健康，安全性の問題に関して\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003eSEMI\nS2\u003c\/span\u003e\u003cspan lang=\"JA\" style='font-size:10.0pt;line-height:107%;font-family:\n\"Yu Mincho\",serif;mso-ascii-font-family:Arial;mso-fareast-theme-font:minor-fareast;\nmso-hansi-font-family:Arial;mso-bidi-font-family:Arial'\u003eの基準に従い査定されるべきである。\u003c\/span\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003cb\u003eSubordinate Standards\u003c\/b\u003e (included)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI E49.2 — Guideline for the Qualification of Polymer\nAssemblies Used in Ultrapure Water and Liquid Chemical Systems in Semiconductor\nProcess Equipment\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI E49.4 — Guide for High Purity Solvent Distribution\nSystems in Semiconductor Manufacturing Equipment\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI E49.5 — Guide for Ultrahigh Purity Solvent\nDistribution Systems in Semiconductor Manufacturing Equipment\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI E49.6 — Guide for Subsystem Assembly and Testing Procedures\n– Stainless Steel Systems\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI E49.7 — Purity Guide for the Design and Manufacture of\nUltrapure Water and Liquid Chemical Systems in Semiconductor Process Equipment\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003eSEMI E49.8 — Guide for High Purity and Ultrahigh Purity Gas\nDistribution Systems in Semiconductor Manufacturing Equipment\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;line-height:107%;font-family:\n\"Arial\",sans-serif'\u003e\u003co:p\u003e \u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-size:10.0pt;\nline-height:107%;font-family:\"Arial\",sans-serif'\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\n(purchase separately)\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style=\"mso-bookmark:OLE_LINK1\"\u003e\u003cspan style='font-size:\n10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003eSEMI E35 — Guide to\nCalculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing\nEquipment\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style=\"mso-bookmark:OLE_LINK1\"\u003e\u003cspan style='font-size:\n10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003eSEMI E137 — Guide for\nFinal Assembly, Packaging, Transportation, Unpacking, and Relocation of\nSemiconductor Manufacturing Equipment\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/p\u003e\n\n\u003cp class=\"MsoNormal\"\u003e\u003cspan style=\"mso-bookmark:OLE_LINK1\"\u003e\u003cspan style='font-size:\n10.0pt;line-height:107%;font-family:\"Arial\",sans-serif'\u003eSEMI S2 —\nEnvironmental, Health, and Safety Guideline for Semiconductor Manufacturing\nEquipment\u003co:p\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cbr\u003e\u003cp\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E49-1104 (Reapproved 1211) - Superseded","offer_id":40234341564483,"sku":"8197","price":38100.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_af717cb2-1c9d-4d78-b4b7-5cb715051f42.png?v=1776702104","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e04900-semi-e49-%e9%ab%98%e7%b4%94%e5%ba%a6%e3%81%8a%e3%82%88%e3%81%b3%e8%b6%85%e9%ab%98%e7%b4%94%e5%ba%a6%e9%85%8d%e7%ae%a1%e3%82%b7%e3%82%b9%e3%83%86%e3%83%a0%e3%81%ae%e6%80%a7%e8%83%bd-%e3%82%b5%e3%83%96%e3%82%a2%e3%82%bb%e3%83%b3%e3%83%96%e3%83%aa-%e6%9c%80%e7%b5%82%e7%b5%84%e7%ab%8b%e3%81%ae%e3%81%9f%e3%82%81%e3%81%ae%e3%82%ac%e3%82%a4%e3%83%89","provider":"SEMI Dev 2","version":"1.0","type":"link"}