{"product_id":"e04701-semi-e47-1-mechanical-specification-for-foups-used-to-transport-and-store-300-mm-wafers","title":"E04701 - SEMI E47.1 - Mechanical Specification for FOUPS Used to Transport and Store 300 mm Wafers","description":"\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eNOTICE: \u003c\/strong\u003eThis Standard or Safety Guideline has Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e1  Purpose\u003cbr\u003e1.1  This Standard partially specifies the FOUPs used to transport and store 300 mm wafers in an IC manufacturing facility.\u003cbr\u003e2  Scope\u003cbr\u003e2.1  This Standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and interchangeability at all mechanical interfaces. Most of the requirements given in this Specification are in the form of maximum or minimum dimensions with very few required surfaces. Only the physical interfaces (other than the door mechanism and kinematic couplings) for FOUPs are specified; no materials requirements or microcontamination limits are given. The enclosure specified in this Standard can be a sealed minienvironment, but it could also just be a box with well-defined interfaces.\u003cbr\u003e\u003cstrong\u003eNOTICE:\u003c\/strong\u003e SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003cbr\u003eSEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers\u003cbr\u003eSEMI E15 — Specification for Tool Load Port\u003cbr\u003eSEMI E15.1 — Specification for 300 mm Tool Load Port\u003cbr\u003eSEMI E19 — Standard Mechanical Interface (SMIF)\u003cbr\u003eSEMI E47 — Specification for 150 mm\/200 mm Pod Handles\u003cbr\u003eSEMI E57 — Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers\u003cbr\u003eSEMI E62 — Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)\u003cbr\u003eSEMI S8 — Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment\u003cbr\u003e\u003cstrong\u003eNOTICE:\u003c\/strong\u003e Unless otherwise indicated, all documents cited shall be the latest published versions.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI E47.1-1106 (Reapproved 0512)\u003cbr\u003eSEMI E47.1-1106 (technical revision)\u003cbr\u003eSEMI E47.1-0706 (technical revision)\u003cbr\u003eSEMI E47.1-0306 (technical revision)\u003cbr\u003eSEMI E47.1-0305 (technical revision)\u003cbr\u003eSEMI E47.1-1104 (technical revision)\u003cbr\u003eSEMI E47.1-0704 (technical revision)\u003cbr\u003eSEMI E47.1-0304 (technical revision)\u003cbr\u003eSEMI E47.1-0303 (technical revision)\u003cbr\u003eSEMI E47.1-1101 (technical revision)\u003cbr\u003eSEMI E47.1-0701 (technical revision)\u003cbr\u003eSEMI E47.1-0301 (technical revision)\u003cbr\u003eSEMI E47.1-0200 (technical revision)\u003cbr\u003eSEMI E47.1-0999 (technical revision)\u003cbr\u003eSEMI E47.1-0699 (technical revision)\u003cbr\u003eSEMI E47.1-0298 (technical revision)\u003cbr\u003eSEMI E47.1-0697 (first published)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E47.1-1106 (Reapproved 0512) - Inactive","offer_id":40234329768003,"sku":"5884","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E47.1-1106 - Superseded","offer_id":40234329833539,"sku":"7346","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E47.1-0706 - Superseded","offer_id":40234329899075,"sku":"7344","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E47.1-0306 - Superseded","offer_id":40234329931843,"sku":"7343","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E47.1-0305 - Superseded","offer_id":40234329964611,"sku":"7342","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E47.1-1104 - Superseded","offer_id":40234329997379,"sku":"7345","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E47.1-0704 - Superseded","offer_id":40234330030147,"sku":"7862","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E47.1-0304 - Superseded","offer_id":40234330062915,"sku":"7863","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_d9903552-3280-4471-868e-a3d8942593d3.png?v=1776702301","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e04701-semi-e47-1-mechanical-specification-for-foups-used-to-transport-and-store-300-mm-wafers","provider":"SEMI Dev 2","version":"1.0","type":"link"}