{"product_id":"e04600-semi-e46-test-method-for-the-determination-of-organic-contamination-from-minienvironments-using-ion-mobility-spectrometry-ims","title":"E04600 - SEMI E46 - Test Method for the Determination of Organic Contamination from Minienvironments Using Ion Mobility Spectrometry (IMS)","description":"\u003cp\u003e \u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf0\"\u003e\u003cstrong\u003eNOTICE: \u003c\/strong\u003eThis Standard or Safety Guideline has Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e \u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf0\"\u003e1 Purpose\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf0\"\u003e1.1 The purpose of this Test Method is to provide an analytical procedure—ion mobility spectrometry (IMS)—for the determination of organic contamination from minienvironments which has the capability of testing their construction material.\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf0\"\u003e1.2 This Test Method is intended as an alternative to SEMI E108. The main difference between SEMI E108 and this Standard is that SEMI E108 defines a test method which is based on gas chromatography\/mass spectrometry in combination with thermal desorption as the measurement technique while this Standard is based on ion mobility spectroscopy. The results of SEMI E108 and this Standard are given in different units.\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf0\"\u003e2 Scope\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf0\"\u003e2.1 Silicon wafers passed through or stored in minienvironments may be affected by organic contamination originating from construction materials. Knowledge of this contamination assists the decision about the application of minienvironments in semiconductor manufacturing.\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf0\"\u003e2.2 IMS was chosen as the method to determine this contamination because it provides an easy, widely applicable, fast and sensitive way to measure organic contamination on surfaces.\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf0\"\u003e2.3 Furthermore, IMS provides the possibility of checking the contaminating effects of processing, chemical carryover, and the characterization of future polymeric materials for use in semiconductor technology.\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf0\"\u003e\u003cstrong\u003eNOTICE:\u003c\/strong\u003e SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e \u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003e\u003cstrong\u003eReferenced SEMI Standards \u003c\/strong\u003e(purchase separately)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf0\"\u003eSEMI E19 — Standard Mechanical Interface (SMIF)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf0\"\u003eSEMI E108 — Test Method for the Assessment of Outgassing Organic Contamination from Minienvironments using Gas Chromatography\/Mass Spectroscopy\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003e\u003cstrong\u003eNOTICE:\u003c\/strong\u003e Unless otherwise indicated, all documents cited shall be the latest published versions.\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e \u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf0\"\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E46-0307 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E46-0301 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E46-95 (first published)\u003c\/span\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E46-0307 - Inactive","offer_id":40234317217859,"sku":"5883","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E46-0301 - Superseded","offer_id":40234317348931,"sku":"7339","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E46-95 - Superseded","offer_id":40234317480003,"sku":"7853","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_b087839a-7606-4835-90a6-8917b92ce65c.png?v=1776702307","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e04600-semi-e46-test-method-for-the-determination-of-organic-contamination-from-minienvironments-using-ion-mobility-spectrometry-ims","provider":"SEMI Dev 2","version":"1.0","type":"link"}