{"product_id":"e03300-semi-e33-guide-for-semiconductor-manufacturing-equipment-electromagnetic-compatibility-emc","title":"E03300 - SEMI E33 - Guide for Semiconductor Manufacturing Equipment Electromagnetic Compatibility (EMC)","description":"\u003cp\u003e \u003c\/p\u003e\u003cp\u003e1  Purpose\u003cbr\u003e1.1  The purpose of this Guide is make recommendations to help assure that manufacturing equipment used for manufacturing semiconductor devices will operate reliably without failures caused by electromagnetic interference (EMI). This desired characteristic is generally known as electromagnetic compatibility (EMC).\u003cbr\u003e2  Scope\u003cbr\u003e2.1  This Guide applies to equipment constructed for the purpose of manufacturing semiconductor devices. Equipment types include communications equipment, control equipment, processing equipment, metrology equipment, inspection equipment, automation equipment, and information technology equipment. Some terms are specialized to semiconductor facilities and equipment.\u003cbr\u003e2.2  The primary focus of this Guide is semiconductor manufacturing equipment used for manufacturing semiconductor devices, but this Guide may also be applied to the equipment used for manufacturing related products (e.g., flat panel displays [FPDs], microelectromechanical systems [MEMS]).\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003cbr\u003eSEMI E78 — Guide to Assess and Control Electrostatic Discharge (ESD) and Electrostatic Attraction (ESA) for Equipment\u003cbr\u003eSEMI F47 — Specification for Semiconductor Processing Equipment Voltage Sag Immunity\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI E33-0824 (technical revision)\u003cbr\u003eSEMI E33-0217E (editorial revision)\u003cbr\u003eSEMI E33-0217 (technical revision)\u003cbr\u003eSEMI E33-1012 (technical revision)\u003cbr\u003eSEMI E33-94 (first published)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E33-0824 - Current","offer_id":43106899591235,"sku":"17939","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E33-0217E - Superseded","offer_id":43106899624003,"sku":"3805","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E33-0217 - Superseded","offer_id":40234253549635,"sku":"7831","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E33-1012 - Superseded","offer_id":40234253615171,"sku":"7716","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E33-94 - Superseded","offer_id":40234253680707,"sku":"7320","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_b1617f84-f1bf-4c49-a6a8-f7f468d8bf87.png?v=1776702836","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e03300-semi-e33-guide-for-semiconductor-manufacturing-equipment-electromagnetic-compatibility-emc","provider":"SEMI Dev 2","version":"1.0","type":"link"}