{"product_id":"e03005-semi-e30-5-specification-for-metrology-specific-equipment-model-msem","title":"E03005 - SEMI E30.5 - Specification for Metrology Specific Equipment Model (MSEM)","description":"\u003cp\u003e \u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eThis Standard establishes a Specific Equipment Model (SEM) for Metrology equipment (MSEM). The MSEM consists of equipment characteristics and behaviors that are applicable to this class of equipment and are required to be implemented in addition to the SEMI E30 fundamental requirements and additional capabilities.\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e \u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eThe scope of this Standard is limited to defining the behavior of Metrology equipment as perceived by a SEMI Equipment Communications Standard 2 Message Content (SECS-II) host that complies with the SEMI E30 model. It defines the view of the equipment through the SECS II link. It does not define the internal operation of the equipment. It includes a specific processing state model as the basis for all equipment behavior of this class.\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e \u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eThis Standard assumes that the SEMI E30 fundamental requirements and all additional capabilities except those noted in SEMI E30 Capabilities Section in this Standard have been implemented on the MSEM equipment. This Standard expands the SEMI E30 Standard requirements and capabilities in the areas of the processing state model, collection events, Process Program management, remote commands, data item variables, and coordinate systems.\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e \u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003e\u003cstrong\u003eReferenced SEMI Standards \u003c\/strong\u003e(purchase separately)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E5 \u003c\/span\u003e\u003cspan style=\"font-family:Symbol;mso-ascii-font-family:Arial;mso-bidi-font-family:Arial;mso-char-type:symbol;mso-hansi-font-family:Arial;mso-symbol-font-family:Symbol;\"\u003e¾\u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003e SEMI Equipment Communications Standard 2 Message Content (SECS-II)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E37.1 \u003c\/span\u003e\u003cspan style=\"font-family:Symbol;mso-ascii-font-family:Arial;mso-bidi-font-family:Arial;mso-char-type:symbol;mso-hansi-font-family:Arial;mso-symbol-font-family:Symbol;\"\u003e¾\u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003e High-Speed SECS Message Services Single Selected-Session Mode (HSMS-SS)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E58 \u003c\/span\u003e\u003cspan style=\"font-family:Symbol;mso-ascii-font-family:Arial;mso-bidi-font-family:Arial;mso-char-type:symbol;mso-hansi-font-family:Arial;mso-symbol-font-family:Symbol;\"\u003e¾\u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003e Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M20 — Practice for Establishing a Wafer Coordinate System\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI M21 \u003c\/span\u003e\u003cspan style=\"font-family:Symbol;mso-ascii-font-family:Arial;mso-bidi-font-family:Arial;mso-char-type:symbol;mso-hansi-font-family:Arial;mso-symbol-font-family:Symbol;\"\u003e¾\u003c\/span\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003e Guide for Assigning Addresses to Rectangular Elements in a Cartesian Array\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e \u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E30.5-0302 (Reapproved 0423)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E30.5-0302 (Reapproved 0217)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E30.5-0302 (Reapproved 0308)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E30.5-0302 (technical revision)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e\u003cp class=\"MsoNormal\"\u003e\u003cspan style='font-family:\"Arial\",sans-serif;'\u003eSEMI E30.5-0701 (first published)\u003c\/span\u003e\u003co:p\u003e\u003c\/o:p\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E30.5-0302 (Reapproved 0423) - Current","offer_id":43106899951683,"sku":"16497","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30.5-0302 (Reapproved 0217) - Superseded","offer_id":43106899984451,"sku":"3803","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30.5-0302 (Reapproved 0308) - Superseded","offer_id":40234268557379,"sku":"7319","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30.5-0302 - Superseded","offer_id":40234268852291,"sku":"7318","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30.5-0701 - Superseded","offer_id":40234269081667,"sku":"7735","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_S_ad4a9a3c-ae73-4055-86e4-c70eb0c337a5.png?v=1776702838","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e03005-semi-e30-5-specification-for-metrology-specific-equipment-model-msem","provider":"SEMI Dev 2","version":"1.0","type":"link"}