{"product_id":"e03005-semi-e30-5-計測装置の特定装置モデル","title":"E03005 - SEMI E30.5 - 計測装置の特定装置モデル","description":"\u003cp class=\"Indent\" style=\"TEXT-ALIGN: justify; MARGIN: 0in 21pt 0pt\"\u003e\u003cfont size=\"2\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003e\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e本スタンダードは，\u003cspan style=\"mso-fareast-language: JA\"\u003eglobal Information \u0026amp; Control\u003cspan style=\"mso-fareast-language: JA\"\u003e Committee\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eで技術的に承認されている。現版は\u003cspan style=\"mso-fareast-language: JA\"\u003e2007\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e年\u003cspan style=\"mso-fareast-language: JA\"\u003e12\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e月\u003cspan style=\"mso-fareast-language: JA\"\u003e20\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e日，\u003cspan style=\"mso-fareast-language: JA\"\u003eglobal Audits and Reviews Subcommittee\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eにて発行が承認された。\u003cspan style=\"mso-fareast-language: JA\"\u003e2008\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e年\u003cspan style=\"mso-fareast-language: JA\"\u003e2\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e月に\u003cspan style=\"mso-fareast-language: JA\"\u003ewww.semi.org\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eで，そして\u003cspan style=\"mso-fareast-language: JA\"\u003e2008\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e年\u003cspan style=\"mso-fareast-language: JA\"\u003e3\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e月に\u003cspan style=\"mso-fareast-language: JA\"\u003eCD-ROM\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eで入手可能となる。初版は\u003cspan style=\"mso-fareast-language: JA\"\u003e2001\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e年発行，前版は\u003cspan style=\"mso-fareast-language: JA\"\u003e2002\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e年に発行された。\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e \u003cp style=\"TEXT-ALIGN: justify; MARGIN: 0in 21pt 0pt\" class=\"Indent\"\u003e\u003cfont size=\"2\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003e\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\" lang=\"JA\"\u003e\u003cspan style=\"mso-fareast-language: JA\"\u003e\u003co:p\u003e\u003c\/o:p\u003e \u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e \u003cp class=\"Indent\" style=\"TEXT-ALIGN: justify; MARGIN: 0in 21pt 0pt\"\u003e\u003cspan style=\"mso-fareast-language: JA\"\u003e\u003co:p\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e \u003c\/font\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \u003cp class=\"Note\" style=\"TEXT-INDENT: 0in; MARGIN: 3pt 0in\"\u003e\u003cfont size=\"2\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003e\u003cspan style=\"mso-fareast-language: JA; mso-bidi-font-family: 'MS PMincho'\"\u003e\u003cspan style=\"mso-list: Ignore\"\u003e注 1:\u003cspan style=\"FONT: 7pt 'Times New Roman'\"\u003e \u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003e本プロダクトの完全な仕様には\u003cspan style=\"mso-fareast-language: JA\"\u003eSEMI E30\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eの一般的な要求事項が全部含まれる。\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e \u003cp style=\"TEXT-INDENT: 0in; MARGIN: 3pt 0in\" class=\"Note\"\u003e\u003cfont size=\"2\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003e\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\" lang=\"JA\"\u003e \u003c\/span\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cfont size=\"2\"\u003e\u003cfont face=\"Microsoft Sans Serif\"\u003e\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\" lang=\"JA\"\u003e\u003cspan style=\"mso-fareast-language: JA\"\u003e\u003co:p\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e本スタンダードでは計測装置（\u003cfont size=\"2\" face=\"Arial\"\u003eMSEM\u003cfont lang=\"JA\" size=\"2\" face=\"MS Gothic,‚l‚r ƒSƒVƒbƒN\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS Gothic,‚l‚r ƒSƒVƒbƒN\"\u003e）のための特定装置モデル（\u003cfont size=\"2\" face=\"Arial\"\u003eSEM\u003cfont lang=\"JA\" size=\"2\" face=\"MS Gothic,‚l‚r ƒSƒVƒbƒN\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS Gothic,‚l‚r ƒSƒVƒbƒN\"\u003e）を確立する。この\u003cfont size=\"2\" face=\"Arial\"\u003eMSEM\u003cfont lang=\"JA\" size=\"2\" face=\"MS Gothic,‚l‚r ƒSƒVƒbƒN\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS Gothic,‚l‚r ƒSƒVƒbƒN\"\u003eは，このクラスの装置に適用する装置特性および挙動で構成され，これらを\u003cfont size=\"2\" face=\"Arial\"\u003eSEMI E30\u003cfont lang=\"JA\" size=\"2\" face=\"MS Gothic,‚l‚r ƒSƒVƒbƒN\"\u003e\u003cfont lang=\"JA\" size=\"2\" face=\"MS Gothic,‚l‚r ƒSƒVƒbƒN\"\u003eの基本要求条件および追加性能に加えて，実装することが要求されている。\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/o:p\u003e \u003ch2 style=\"TEXT-INDENT: 0in; MARGIN: 3pt 0in\"\u003e\u003cspan style=\"mso-fareast-language: JA; mso-fareast-font-family: 'Times New Roman'\"\u003e\u003cspan style=\"mso-list: Ignore\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e \u003c\/font\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/h2\u003e \u003ch2 style=\"TEXT-INDENT: 0in; MARGIN: 3pt 0in\"\u003e \u003c\/h2\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\n\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfonthelv\u003e\u003cfonthelv\u003e \u003cp dir=\"ltr\"\u003e\u003cfont\u003eSEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)\u003cbr\u003e \u003cp dir=\"ltr\"\u003e\u003cfont\u003e\u003cfont\u003eSEMI E37.1\u003cfont\u003e — High-Speed SECS Message Services Single Selected-Session Mode (HSMS-SS)\u003cbr\u003e \u003cp dir=\"ltr\"\u003e\u003cfont\u003eSEMI E58 — Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services\u003cbr\u003e \u003cp dir=\"ltr\"\u003e\u003cfont\u003eSEMI M20 — Practice for Establishing a Wafer Coordinate System\u003cbr\u003e \u003cp dir=\"ltr\"\u003e\u003cfont\u003eSEMI M21 — Guide for Assigning Addresses to Rectangular Elements in a Cartesian Array\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/fonthelv\u003e\u003c\/fonthelv\u003e\u003c\/p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/font\u003e","brand":"semi.org","offers":[{"title":"SEMI E30.5-0302 (Reapproved 0308) - Superseded","offer_id":40234346152003,"sku":"8168","price":38100.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30.5-0302 - Superseded","offer_id":40234346414147,"sku":"8169","price":38100.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_S_83f58e68-6009-4f44-8a18-c6c0fe6a169f.png?v=1776702117","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e03005-semi-e30-5-%e8%a8%88%e6%b8%ac%e8%a3%85%e7%bd%ae%e3%81%ae%e7%89%b9%e5%ae%9a%e8%a3%85%e7%bd%ae%e3%83%a2%e3%83%87%e3%83%ab","provider":"SEMI Dev 2","version":"1.0","type":"link"}