{"product_id":"e03000-semi-e30-specification-for-the-generic-model-for-communications-and-control-of-manufacturing-equipment-gem","title":"E03000 - SEMI E30 - Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)","description":"\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf0\"\u003e* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version.\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e \u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf0\"\u003e\u003cstrong\u003e1 Purpose\u003c\/strong\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf0\"\u003e1.1 GEM defines a standard implementation of SECS-II for all semiconductor manufacturing equipment. The GEM Standard defines a common set of equipment behavior and communications capabilities that provide the functionality and flexibility to support the manufacturing automation programs of semiconductor device manufacturers. Equipment suppliers may provide additional SECS-II functionality not included in GEM as long as the additional functionality does not conflict with any of the behavior or capabilities defined in GEM. Such additions may include SECS-II messages, collection events, alarms, remote commands, processing states, variable data items (data variables, status variables or equipment constants), or other functionality that is unique to a class (etchers, steppers, etc.) or specific instance of equipment.\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf0\"\u003e1.1.1 GEM is intended to produce economic benefits for both device manufacturers and equipment suppliers. Equipment suppliers benefit from the ability to develop and market a single SECS-II interface that satisfies most customers. Device manufacturers benefit from the increased functionality and standardization of the SECS-II interface across all manufacturing equipment. This standardization reduces the cost of software development for both equipment suppliers and device manufacturers. By reducing costs and increasing functionality, device manufacturers can automate semiconductor factories more quickly and effectively. The flexibility provided by the GEM Standard also enables device manufacturers to implement unique automation solutions within a common industry framework.\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf0\"\u003e1.1.2 The GEM Standard is intended to specify the following:\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003e• A model of the behavior to be exhibited by semiconductor manufacturing equipment in a SECS-II communication environment,\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003e• A description of information and control functions needed in a semiconductor manufacturing environment,\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003e• A definition of the basic SECS-II communications capabilities of semiconductor manufacturing equipment,\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003e• A single consistent means of accomplishing an action when SECS-II provides multiple possible methods, and\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003e• Standard message dialogues necessary to achieve useful communications capabilities.\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003e1.1.3 The GEM Standard contains two types of requirements:\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003e• fundamental GEM requirements and\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003e• requirements of additional GEM capabilities.\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003e1.1.4 The fundamental GEM requirements form the foundation of the GEM Standard. The additional GEM capabilities provide functionality required for some types of factory automation or functionality applicable to specific types of equipment. A detailed list of the fundamental GEM requirements and additional GEM capabilities can be found in \u003c\/span\u003e\u003cspan class=\"cf0\"\u003e§ 11, GEM Compliance.\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf0\"\u003e1.1.5 Equipment suppliers should work with their customers to determine which additional GEM capabilities should be implemented for a specific type of equipment. Because the capabilities defined in the GEM Standard were specifically developed to meet the factory automation requirements of semiconductor manufacturers, it is anticipated that most device manufacturers will require most of the GEM capabilities that apply to a particular type of equipment. Some device manufacturers may not require all the GEM capabilities due to differences in their factory automation strategies.\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf0\"\u003e\u003cstrong\u003e2 Scope\u003c\/strong\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf0\"\u003e2.1 The scope of the GEM Standard is limited to defining the behavior of semiconductor equipment as viewed through a communications link. The SEMI E5 (SECS-II) Standard provides the definition of messages and related data items exchanged between host and equipment. The GEM Standard defines which SECS-II messages should be used, in what situations, and what the resulting activity should be.\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf0\"\u003e\u003cstrong\u003eReferenced SEMI Standards \u003c\/strong\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf0\"\u003eSEMI E4 \u003c\/span\u003e\u003cspan class=\"cf1\"\u003e— Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E5 — Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E37 — Specification for High-Speed SECS Message Services (HSMS) Generic Services\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E42 — Recipe Management Standard: Concepts, Behavior, and Message Services\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E139 — Specification for Recipe and Parameter Management (RaP)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E172 — Specification for SECS Equipment Data Dictionary (SEDD)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E173 — Specification for XML SECS-II Message Notation (SMN)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e \u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf0\"\u003eSEMI E30-0725 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E30-0125 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E30-1024 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E30-0224 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E30-0423 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E30-0520 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E30-0418 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E30-0717 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E30-0416 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E30-0611 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E30-0307E2 (editorial revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E30-0307E (editorial revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E30-0307 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E30-1103E2 (editorial revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E30-1103E (editorial revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E30-1103 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E30-0703 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E30-0303 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E30-1000 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E30-0600 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E30-0200A (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E30-0200 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E30-0299 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E30-0998 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E30-0298 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E30-0997 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E30-1296 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E30-0996 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E30-95 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E30-94 (technical revision)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e\u003cspan class=\"cf1\"\u003eSEMI E30-93 (first published)\u003c\/span\u003e\u003c\/p\u003e\u003cp class=\"pf0\"\u003e \u003c\/p\u003e\u003cp class=\"pf0\"\u003e \u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E30-0725 - Current","offer_id":43106899656771,"sku":"18656","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30-0725 - Current + Redline","offer_id":43106899689539,"sku":"18657","price":76800.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30-0125 - Superseded + Redline","offer_id":43106899722307,"sku":"18201","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30-0125 - Superseded","offer_id":43106899755075,"sku":"18198","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30-1024 - Superseded","offer_id":43106899787843,"sku":"18032","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30-1024 - Superseded + Redline","offer_id":43106899820611,"sku":"18034","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30-0224 - Superseded","offer_id":43106899853379,"sku":"17378","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30-0423 - Superseded","offer_id":43106899886147,"sku":"16483","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30-0520 - Superseded","offer_id":43106899918915,"sku":"13839","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30-0418 - Superseded","offer_id":40234276421699,"sku":"3804","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30-0717 - Superseded","offer_id":40234276454467,"sku":"7836","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30-0416 - Superseded","offer_id":40234276487235,"sku":"7818","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30-0611 - Superseded","offer_id":40234276520003,"sku":"7653","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30-0307E2 - Superseded","offer_id":40234276552771,"sku":"7610","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30-0307E - Superseded","offer_id":40234276585539,"sku":"7312","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30-0307 - Superseded","offer_id":40234276618307,"sku":"7311","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30-1103E2 - Superseded","offer_id":40234276651075,"sku":"7315","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30-1103E - Superseded","offer_id":40234276683843,"sku":"7314","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30-1103 - Superseded","offer_id":40234276716611,"sku":"7313","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30-0703 - Superseded","offer_id":40234276749379,"sku":"7733","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30-0303 - Superseded","offer_id":40234276782147,"sku":"7732","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30-1000 - Superseded","offer_id":40234276814915,"sku":"7731","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30-0600 - Superseded","offer_id":40234276847683,"sku":"7730","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30-0200A - Superseded","offer_id":40234276880451,"sku":"7729","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30-0200 - Superseded","offer_id":40234276913219,"sku":"7728","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30-0299 - Superseded","offer_id":40234276945987,"sku":"7727","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30-0998 - Superseded","offer_id":40234276978755,"sku":"7726","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30-0298 - Superseded","offer_id":40234277011523,"sku":"7725","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30-0997 - Superseded","offer_id":40234277044291,"sku":"7724","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30-1296 - Superseded","offer_id":40234277077059,"sku":"7723","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30-0996 - Superseded","offer_id":40234277109827,"sku":"7722","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30-95 - Superseded","offer_id":40234277142595,"sku":"7721","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30-94 - Superseded","offer_id":40234277175363,"sku":"7720","price":62700.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E30-93 - Superseded","offer_id":40234277208131,"sku":"7719","price":62700.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_S_8f62fa15-4a51-4790-9263-16ea763e7e4c.png?v=1776702837","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e03000-semi-e30-specification-for-the-generic-model-for-communications-and-control-of-manufacturing-equipment-gem","provider":"SEMI Dev 2","version":"1.0","type":"link"}