{"product_id":"e02900-semi-e29-terminology-for-the-calibration-of-mass-flow-controllers-and-mass-flow-meters","title":"E02900 - SEMI E29 - Terminology for the Calibration of Mass Flow Controllers and Mass Flow Meters","description":"\u003cp style=\"text-align:justify;\" dir=\"ltr\"\u003e \u003c\/p\u003e\u003cp\u003eThis Standard defines terms commonly used in the calibration of mass flow controllers (MFC) and mass flow meters (MFM). It is intended to provide for worldwide terminology to be used by manufacturers and users.\u003c\/p\u003e\u003cp\u003e\u003cbr\u003eThis Standard defines terminology related to MFC\/MFM calibration. At present, there are often several words used by the semiconductor industry to describe the same concept or device. This Standard is intended to eliminate confusion and provide for a common language which users and manufacturers can employ to discuss MFC\/MFM calibration.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003cbr\u003eSEMI E12 — Guide for Standard Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers\u003cbr\u003eSEMI E18 — Guide for Temperature Specifications of the Mass Flow Controller\u003cbr\u003eSEMI E28 — Guide for Pressure Specifications of the Mass Flow Controller\u003c\/p\u003e\u003cp\u003e\u003cbr\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI E29-1223 (technical revision)\u003cbr\u003eSEMI E29-1110 (Reapproved 0417)\u003cbr\u003eSEMI E29-1110 (technical revision)\u003cbr\u003eSEMI E29-93 (Reapproved 0710)\u003cbr\u003eSEMI E29-93 (Reapproved 1104)\u003cbr\u003eSEMI E29-93 (Reapproved 0299)\u003cbr\u003eSEMI E29-93 (first published)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E29-1223 - Current","offer_id":43106900082755,"sku":"17297","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E29-1110 (Reapproved 0417) - Superseded","offer_id":43106900115523,"sku":"3801","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E29-1110 - Superseded","offer_id":40234253516867,"sku":"7619","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E29-93 (Reapproved 0710) - Superseded","offer_id":40234253647939,"sku":"7603","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E29-93 (Reapproved 1104) - Superseded","offer_id":40234253713475,"sku":"7310","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_a53261bf-00db-467b-a580-0cf2528fc414.png?v=1776702839","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e02900-semi-e29-terminology-for-the-calibration-of-mass-flow-controllers-and-mass-flow-meters","provider":"SEMI Dev 2","version":"1.0","type":"link"}