{"product_id":"e02800-semi-e28-guide-for-pressure-specifications-of-the-mass-flow-controller","title":"E02800 - SEMI E28 - Guide for Pressure Specifications of the Mass Flow Controller","description":"\u003cp style=\"text-align:justify;\" dir=\"ltr\"\u003e \u003c\/p\u003e\u003cp\u003e1  Purpose\u003cbr\u003e1.1  The purpose of this Guide is to establish a uniform, worldwide means to describe pressure parameters as they relate to mass flow controllers (MFC). It is intended to prevent confusion and misunderstanding between manufacturers and users.\u003cbr\u003e2  Scope\u003cbr\u003e2.1  This Guide contains definitions of terms which describe gas pressure in MFCs as used in the semiconductor industry. SI units are the reference units for this Guide.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003cbr\u003eSEMI E12 — Guide for Standardized Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI E28-0218 (technical revision)\u003cbr\u003eSEMI E28-1110 (technical revision)\u003cbr\u003eSEMI E28-92 (Reapproved 0710)\u003cbr\u003eSEMI E28-92 (Reapproved 1104)\u003cbr\u003eSEMI E28-92 (Reapproved 0299)\u003cbr\u003eSEMI E28-92 (first published)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E28-0218 - Current","offer_id":40234246897731,"sku":"3800","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E28-1110 - Superseded","offer_id":40234246963267,"sku":"7617","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E28-92 (Reapproved 0710) - Superseded","offer_id":40234247028803,"sku":"7602","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E28-92 (Reapproved 1104) - Superseded","offer_id":40234247061571,"sku":"7309","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E28-92 (Reapproved 0299) - Superseded","offer_id":40234247094339,"sku":"7618","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_6faaa174-a1d8-49f4-8aa5-8331bebc8e2c.png?v=1776702840","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e02800-semi-e28-guide-for-pressure-specifications-of-the-mass-flow-controller","provider":"SEMI Dev 2","version":"1.0","type":"link"}