{"product_id":"e02700-semi-e27-guide-for-mass-flow-controller-and-mass-flow-meter-linearity","title":"E02700 - SEMI E27 - Guide for Mass Flow Controller and Mass Flow Meter Linearity","description":"\u003cp\u003e \u003c\/p\u003e\u003cp\u003eThe purpose of this Standard is to establish a uniform, worldwide definition of linearity in order to prevent confusion and misunderstanding between manufacturers and users of mass flow devices. A linearity specification is used to allow prediction to a known level of uncertainty, the output of a mass flow controller (MFC) at points other than those at which its output is known.\u003cbr\u003e\u003cbr\u003eThe scope is to define the linearity of the MFC (controller with integral flow transducer and control valve) and the mass flow meter (MFM) (flow transducer only). Terminal-based linearity is used to describe the linearity of MFCs and MFMs.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003cbr\u003eNone.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI E27-0224 (technical revision)\u003cbr\u003eSEMI E27-1017 (technical revision)\u003cbr\u003eSEMI E27-0611 (technical revision)\u003cbr\u003eSEMI E27-92 (Reapproved 1104)\u003cbr\u003eSEMI E27-92 (Reapproved 0299)\u003cbr\u003eSEMI E27-92 (first published)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E27-0224 - Current","offer_id":43106900148291,"sku":"17402","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E27-1017 - Superseded","offer_id":43106900181059,"sku":"3799","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E27-0611 - Superseded","offer_id":40234262069315,"sku":"7654","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E27-92 (Reapproved 1104) - Superseded","offer_id":40234262233155,"sku":"7308","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_392a9694-f9f6-4eee-8493-45c09c40ff7e.png?v=1776702841","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e02700-semi-e27-guide-for-mass-flow-controller-and-mass-flow-meter-linearity","provider":"SEMI Dev 2","version":"1.0","type":"link"}