{"product_id":"e02600-semi-e26-radial-cluster-tool-footprint-standard","title":"E02600 - SEMI E26 - Radial Cluster Tool Footprint Standard","description":"\u003cp\u003eThis standard was technically approved by the global Physical Interfaces \u0026amp; Carriers Committee and is the direct responsibility of the North American Physical Interfaces \u0026amp; Carriers Committee. Current edition reapproved by the North American Regional Standards Committee on August 16 2004. Initially available at www.semi.org September 2004; to be published November 2004. Originally published in 1992; last published June 1999. \u003c\/p\u003e \u003cp\u003e \u003c\/p\u003e \u003cp\u003eNOTICE: This document was balloted and approved for withdrawal in 2004. \u003c\/p\u003e \u003cp\u003e \u003c\/p\u003e \u003cp\u003eThe purpose of the standard is to ensure that modules from different suppliers can be integrated into a radial cluster tool. It provides design specifications to equipment manufacturers so that physical interference between adjacent modules in a radial cluster tool is avoided and access to all modules of the cluster tool is guaranteed. \u003c\/p\u003e \u003cp\u003e \u003c\/p\u003e \u003cp\u003eSubordinate Document:\u003c\/p\u003e \u003cp\u003eSEMI E26.1-92 (Withdrawn 1104) - Radial Cluster Tool Footprint 300 mm Standard\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003eSEMI E21 — Cluster Tool Module Interface: Mechanical Interface and Wafer Transport Standard \u003cbr\u003e SEMI E22 — Cluster Tool Module Interface: Transport Module End Effector Exclusion Volume Standard \u003cbr\u003e SEMI E25 — Cluster Tool Module Interface: Module Access Guideline\u003cbr\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E26-92 (Withdrawn 1104) - Withdrawn","offer_id":40234343235651,"sku":"8156","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_bc76984c-f128-4cdc-a554-1df5268531de.png?v=1776702125","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e02600-semi-e26-radial-cluster-tool-footprint-standard","provider":"SEMI Dev 2","version":"1.0","type":"link"}