{"product_id":"e02000-semi-e20-cluster-tool-module-interface-electrical-power-and-emergency-off-standard","title":"E02000 - SEMI E20 - Cluster Tool Module Interface: Electrical Power and Emergency Off Standard","description":"\u003cp\u003eThis standard was technically approved by the global Physical Interfaces \u0026amp; Carriers Committee. This edition was approved for publication by the global Audits \u0026amp; Reviews Subcommittee on August 27, 2010. Initially available at www.semi.org in October 2010. Originally published in 1991; previously published November 2002. \u003c\/p\u003e \u003cp\u003e \u003c\/p\u003e \u003cp\u003eNOTICE: This document was balloted and approved for withdrawal in 2010. \u003c\/p\u003e \u003cp\u003e \u003c\/p\u003e \u003cp\u003eThe purpose of the standard is to specify the Emergency Off capability to the modules of a cluster tool; to allow module Emergency Off disconnect and reconnect in a safe manner without removing power from the rest of the tool; and to prevent power from being applied to a module when its Emergency Off is non-functional. \u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003eSEMI E21 — Cluster Tool Module Interface: Mechanical Interface and Wafer Transport Standard\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E20-0697 (Withdrawn 1110) - Withdrawn","offer_id":40234350575683,"sku":"8152","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E20-0697 (Reapproved 1102) - Superseded","offer_id":40234350608451,"sku":"8153","price":24800.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_9cf13788-17d3-4754-9bfb-20fce427a0a8.png?v=1776702129","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e02000-semi-e20-cluster-tool-module-interface-electrical-power-and-emergency-off-standard","provider":"SEMI Dev 2","version":"1.0","type":"link"}