{"product_id":"e01900-semi-e19-specification-for-standard-mechanical-interface-smif","title":"E01900 - SEMI E19 - Specification for Standard Mechanical Interface (SMIF)","description":"\u003cp\u003e\u003cfont face=\"arial\" size=\"2\"\u003e\u003cb style=\"\"\u003eNOTICE: SEMI E19.4 and SEMI E19.5 are no longer published within the SEMI E19 family of Standards. They are each published and sold separately.  \u003c\/b\u003e \u003c\/font\u003e\u003c\/p\u003e\u003cp\u003e\u003cfont face=\"arial\" size=\"2\"\u003e \u003c\/font\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e\u003c\/font\u003e\u003c\/p\u003e\u003cfont style=\"\"\u003e\u003cfont style=\"\"\u003e\u003cfont style=\"\"\u003e\u003cfont face=\"arial\" style=\"\" size=\"2\"\u003e \u003c\/font\u003e\u003cp dir=\"ltr\" align=\"justify\" style=\"\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e  \u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\" style=\"\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eThis Standard was technically approved by the Physical Interfaces \u0026amp; Carriers Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 1216. Available at www.semiviews.org and www.semi.org in April 2017; originally published in 1991; previously published January 2017.\u003c\/font\u003e\u003c\/p\u003e \u003col style=\"\"\u003e \u003col\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\n\u003c\/ol\u003e\n\u003c\/ol\u003e \u003cp style=\"\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e \u003c\/font\u003e\u003c\/p\u003e \u003cp style=\"\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eNote: This Standard has been purposely restricted to 100 mm (4 in.), 125 mm (5 in.), and 150 mm (6 in.) versions of the SMIF port. This has been done to establish a base for SMIF port standardization. Aspects of the 200 mm (8 in.) version have been negotiated by interested parties and published as SEMI E19.4.\u003c\/font\u003e\u003c\/p\u003e \u003col style=\"\"\u003e \u003col\u003e \u003cp\u003e\u003c\/p\u003e\n\u003c\/ol\u003e\n\u003c\/ol\u003e \u003cp dir=\"ltr\" align=\"justify\" style=\"\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\" style=\"\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eA standard interface is required for containers intended to control the transport environment of cassettes containing wafers or disks. The interface must address the proper container orientation for material transfer and maintain continuity between the container and equipment environment in order to control particulate matter.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\" style=\"\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e \u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\" style=\"\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eThis Specification describes one approach to interfacing a clean cassette transport box to a clean environmental housing on a piece of semiconductor processing equipment or to other clean environments. The system concept involves mating a door on a cassette container to a door on an equipment canopy and transferring the cassette into, and out of, the equipment without exposing the cassette and wafers to outside contamination.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\" style=\"\"\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\" style=\"\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e \u003c\/font\u003e\u003c\/p\u003e\n\u003cfont style=\"\"\u003e\u003cfont face=\"arial\" style=\"\" size=\"2\"\u003e \u003c\/font\u003e\u003cp dir=\"ltr\" align=\"justify\" style=\"\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e\u003cb\u003eSubordinate Standards (included): \u003c\/b\u003e\u003c\/font\u003e\u003c\/p\u003e\n\u003cfont style=\"\"\u003e\u003cfont face=\"arial\" style=\"\" size=\"2\"\u003e \u003c\/font\u003e\u003cfont style=\"\"\u003e\u003cfont face=\"arial\" style=\"\" size=\"2\"\u003e \u003c\/font\u003e\u003cp style=\"\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e SEMI E19.1-0417 —  Specification for 100 mm (4 inch) Port for Standard Mechanical Interface (SMIF) \u003c\/font\u003e\u003c\/p\u003e\n\u003cfont style=\"\"\u003e\u003cfont face=\"arial\" style=\"\" size=\"2\"\u003e \u003c\/font\u003e\u003cp style=\"\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e SEMI E19.2-0417 — Specification for 125 mm (5 inch) Port for Standard Mechanical Interface (SMIF) \u003c\/font\u003e\u003c\/p\u003e\n\u003cfont style=\"\"\u003e\u003cfont face=\"arial\" style=\"\" size=\"2\"\u003e \u003c\/font\u003e\u003cp style=\"\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eSEMI E19.3-0417 — Specification for 150 mm (6 inch) Port for Standard Mechanical Interface (SMIF) \u003c\/font\u003e\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\" style=\"\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e\n\u003cfont style=\"\"\u003e\u003cfont face=\"arial\" style=\"\" size=\"2\"\u003e\u003cb style=\"\"\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003c\/font\u003e\u003cp style=\"\"\u003e\u003cfont face=\"arial\" style=\"\" size=\"2\"\u003eSEMI E1 — Specification for Open Plastic and Metal Wafer Carriers\u003cbr\u003e SEMI E15 — Specification for Tool Load Port\u003cbr\u003e SEMI E111 — Mechanical Specification for a 150mm Reticle SMIF Pod (RSP150) Used to Transport and Store a 6 Inch Reticle\u003c\/font\u003e\u003cbr\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/font\u003e","brand":"semi.org","offers":[{"title":"SEMI E19-0417 - Inactive","offer_id":43106900213827,"sku":"3796","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E19-0117 - Superseded","offer_id":40234270425155,"sku":"7827","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E19-1213 - Superseded","offer_id":40234270457923,"sku":"7780","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E19-0912 - Superseded","offer_id":40234270490691,"sku":"7708","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E19-0309 - Superseded","offer_id":40234270523459,"sku":"7475","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E19-1105 - Superseded","offer_id":40234270556227,"sku":"7299","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E19-0697 (Reapproved 0702) - Superseded","offer_id":40234270588995,"sku":"7298","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E19-91 - Superseded","offer_id":40234270621763,"sku":"7297","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_d367a92b-5ea2-455d-8674-fc3fb0d704b7.png?v=1776702843","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e01900-semi-e19-specification-for-standard-mechanical-interface-smif","provider":"SEMI Dev 2","version":"1.0","type":"link"}