{"product_id":"e01200-semi-e12-guide-for-standardized-pressure-temperature-density-and-flow-units-used-in-mass-flow-meters-and-mass-flow-controllers","title":"E01200 - SEMI E12 - Guide for Standardized Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers","description":"\u003cp\u003e \u003c\/p\u003e\u003cp\u003e1  Purpose\u003cbr\u003e1.1  This Guide is intended to provide a common basis for values of standard temperature and pressure when gas flow is expressed in standard volumetric units.\u003cbr\u003e2  Scope\u003cbr\u003e2.1  This Standard provides a common basis for communication between manufacturers and users. This Standard is applicable to all gases and vapors used in semiconductor processing.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003cbr\u003eNone.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI E12-0421 (technical revision)\u003cbr\u003eSEMI E12-1213 (technical revision)\u003cbr\u003eSEMI E12-0303 (Reapproved 0309)\u003cbr\u003eSEMI E12-0303 (technical revision)\u003cbr\u003eSEMI E12-96 (technical revision)\u003cbr\u003eSEMI E12-91 (technical revision)\u003cbr\u003eSEMI E12-89 (technical revision)\u003cbr\u003eSEMI E12-88 (first published)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E12-0421 - Current","offer_id":40234259185731,"sku":"14508","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E12-1213 - Superseded","offer_id":40234259251267,"sku":"3737","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E12-0303 (Reapproved 0309) - Superseded","offer_id":40234259316803,"sku":"7471","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E12-0303 - Superseded","offer_id":40234259382339,"sku":"7204","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_ff988a6b-faeb-416f-a9c3-919bb5e5f355.png?v=1776702887","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e01200-semi-e12-guide-for-standardized-pressure-temperature-density-and-flow-units-used-in-mass-flow-meters-and-mass-flow-controllers","provider":"SEMI Dev 2","version":"1.0","type":"link"}