{"product_id":"e00600-semi-e6-guide-for-semiconductor-equipment-installation-documentation","title":"E00600 - SEMI E6 - Guide for Semiconductor Equipment Installation Documentation","description":"\u003cp\u003e \u003c\/p\u003e\u003cp\u003eNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e1  Purpose\u003cbr\u003e1.1  Within the semiconductor industry, the diversity and complexity of equipment creates difficult challenges for facilities design and equipment installation. This Guide should benefit equipment suppliers and semiconductor manufacturers by communicating, in a standardized way, the information necessary to prepare the facility and to efficiently install semiconductor equipment.\u003cbr\u003e2  Scope\u003cbr\u003e2.1  This Standard applies to the facilities interface of all semiconductor production equipment and supplier-provided support equipment.\u003cbr\u003e2.2  The recommended equipment installation documentation should cover all installation requirements from receiving until hookup is complete.\u003cbr\u003e2.3  The series of data sheets included should address all site facilities necessary to support semiconductor equipment processing.\u003cbr\u003e2.4  The data sheets provide a consistent format for both the equipment supplier and equipment purchaser to use in compiling and interpreting equipment installation data.\u003cbr\u003eNOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.\u003c\/p\u003e\u003cp\u003e\u003cbr\u003e\u003cstrong\u003eReferenced SEMI Standards \u003c\/strong\u003e(purchase separately)\u003cbr\u003eSEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)\u003cbr\u003eSEMI E63 — Mechanical Specification for 300 mm Box Opener\/Loader to Tool Standard (BOLTS-M) Interface\u003cbr\u003eSEMI E70 — Guide for Tool Accommodation Process\u003cbr\u003eSEMI E72 — Specification and Guide for 300 mm Equipment Footprint, Height, and Weight\u003cbr\u003eSEMI E73 — Specification for Vacuum Pump Interfaces – Dry Pumps\u003cbr\u003eSEMI E74 — Specification for Vacuum Pump Interfaces – Turbomolecular Pumps\u003cbr\u003eSEMI E76 — Guide for 300 mm Process Equipment Points of Connection to Facility Services\u003cbr\u003eSEMI E106 — Provisional Overview Guide to SEMI Standards for Physical Interfaces and Carriers for 300 mm Wafers\u003cbr\u003eNOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI E6-0914 (technical revision)\u003cbr\u003eSEMI E6-0303 (complete rewrite)\u003cbr\u003eSEMI E6-1296 (technical revision)\u003cbr\u003eSEMI E6-96 (technical revision)\u003cbr\u003eSEMI E6-92 (technical revision)\u003cbr\u003eSEMI E6-85 (technical revision)\u003cbr\u003eSEMI E6-84 (technical revision)\u003cbr\u003eSEMI E6-82 (first published)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E6-0914 - Inactive","offer_id":43106898411587,"sku":"3841","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E6-0303 - Superseded","offer_id":40234252763203,"sku":"7383","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E6-1296 - Superseded","offer_id":40234252795971,"sku":"7552","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E6-96 - Superseded","offer_id":40234252828739,"sku":"7551","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E6-92 - Superseded","offer_id":40234252861507,"sku":"7550","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E6-85 - Superseded","offer_id":40234252894275,"sku":"7549","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI E6-84 - Superseded","offer_id":40234252927043,"sku":"7548","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_a781655e-b1e6-4e5f-a086-db3d6825e47f.png?v=1776702801","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e00600-semi-e6-guide-for-semiconductor-equipment-installation-documentation","provider":"SEMI Dev 2","version":"1.0","type":"link"}