{"product_id":"e00600-semi-e6-半導体製造装置の設置に関する文書のガイド","title":"E00600 - SEMI E6 - 半導体製造装置の設置に関する文書のガイド","description":"\u003cp class=\"Indent\" style=\"MARGIN: 0in 21pt 0pt; TEXT-ALIGN: justify\"\u003e\u003cfont size=\"2\"\u003e\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'\"\u003e本ガイドは，Global Facilities Committee\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'\"\u003eで技術的に承認されたもので，North American Facilities Committee\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'\"\u003eが直接責任を負うものである。現版は2002\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'\"\u003e年11\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'\"\u003e月22\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'\"\u003e日にNorth American Regional Standards Committee\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'\"\u003eにて承認され\u003cspan lang=\"JA\" style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA\"\u003eている\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'\"\u003e。2003\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'\"\u003e年1\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'\"\u003e月にまずwww.semi.org\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'\"\u003eで入手可能になり，2003\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'\"\u003e年3\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'\"\u003e月発行に至る。初版は1982\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'\"\u003e年発行，前版は1996\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'\"\u003e年12\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'\"\u003e月発行。\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e \u003cp class=\"Indent\" style=\"MARGIN: 0in 21pt 0pt; TEXT-ALIGN: justify\"\u003e\u003cfont size=\"2\"\u003e\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'\"\u003e \u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e \u003cp class=\"Indent\" style=\"MARGIN: 0in 21pt 0pt; TEXT-ALIGN: justify\"\u003e\u003cfont size=\"2\"\u003e\u003cspan style=\"FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: ＭＳ明朝; mso-hansi-font-family: 'Times New Roman'\"\u003e\u003cspan style=\"FONT-FAMILY: ＭＳ明朝; mso-fareast-language: JA; mso-fareast-font-family: 'MS PMincho'\"\u003e\u003c?xml:namespace prefix = o ns = \"urn:schemas-microsoft-com:office:office\" \/\u003e\u003co:p\u003e\u003cstrong\u003e\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-family: 'Times New Roman'; mso-ansi-language: EN-US; mso-bidi-language: AR-SA\"\u003e注意\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'Times New Roman'; mso-fareast-language: JA; mso-fareast-font-family: 'MS PMincho'; mso-ansi-language: EN-US; mso-bidi-language: AR-SA\"\u003e: \u003c\/span\u003e\u003c\/span\u003e\u003c\/strong\u003e\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-family: 'Times New Roman'; mso-ansi-language: EN-US; mso-bidi-language: AR-SA\"\u003e本文書は\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'Times New Roman'; mso-fareast-language: JA; mso-fareast-font-family: 'MS PMincho'; mso-ansi-language: EN-US; mso-bidi-language: AR-SA\"\u003e2002\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-family: 'Times New Roman'; mso-ansi-language: EN-US; mso-bidi-language: AR-SA\"\u003e年，投票により\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'Times New Roman'; mso-fareast-language: JA; mso-fareast-font-family: 'MS PMincho'; mso-ansi-language: EN-US; mso-bidi-language: AR-SA\"\u003eSEMI E6\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-family: 'Times New Roman'; mso-ansi-language: EN-US; mso-bidi-language: AR-SA\"\u003eの全面改訂として承認された。\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/p\u003e \u003cp class=\"Indent\" style=\"MARGIN: 0in 21pt 0pt; TEXT-ALIGN: justify\"\u003e\u003cspan style=\"FONT-FAMILY: ＭＳ明朝; mso-fareast-language: JA; mso-fareast-font-family: 'MS PMincho'\"\u003e\u003co:p\u003e\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-family: 'Times New Roman'; mso-ansi-language: EN-US; mso-bidi-language: AR-SA\"\u003e\u003c\/span\u003e\u003c\/o:p\u003e \u003c\/span\u003e\u003c\/p\u003e \u003cp class=\"Indent\" style=\"MARGIN: 0in 21pt 0pt; TEXT-ALIGN: justify\"\u003e\u003cspan style=\"FONT-FAMILY: ＭＳ明朝; mso-fareast-language: JA; mso-fareast-font-family: 'MS PMincho'\"\u003e\u003co:p\u003e\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-family: 'Times New Roman'; mso-ansi-language: EN-US; mso-bidi-language: AR-SA\"\u003e\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-family: 'Times New Roman'; mso-ansi-language: EN-US; mso-bidi-language: AR-SA\"\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/o:p\u003e \u003c\/span\u003e\u003c\/p\u003e \u003cp class=\"Indent\" style=\"MARGIN: 0in 21pt 0pt; TEXT-ALIGN: justify\"\u003e\u003cspan style=\"FONT-FAMILY: ＭＳ明朝; mso-fareast-language: JA; mso-fareast-font-family: 'MS PMincho'\"\u003e\u003co:p\u003e\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-family: 'Times New Roman'; mso-ansi-language: EN-US; mso-bidi-language: AR-SA\"\u003e\u003cspan lang=\"JA\" style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: JA; mso-bidi-font-family: 'Times New Roman'; mso-ansi-language: EN-US; mso-bidi-language: AR-SA\"\u003e半導体産業では装置（半導体製造装置）が多様かつ複雑になっているため，設備（工場ユーティリティ設備）を設計し，装置を設置する人たちにとって重要な問題が生まれてきている。\u003cspan style=\"FONT-SIZE: 10pt; FONT-FAMILY: 'MS PMincho'; mso-ascii-font-family: 'Times New Roman'; mso-hansi-font-family: 'Times New Roman'; mso-fareast-language: EN-US; mso-bidi-font-family: 'Times New Roman'; mso-ansi-language: EN-US; mso-bidi-language: AR-SA\"\u003e本ガイドにより，設備を準備し，半導体製造装置を効率的に設置するために必要な情報を装置サプライヤ及び半導体製造業者が標準的な方法で交換しあうことによって，両者の利益につながるはずである。\u003c\/span\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/o:p\u003e\u003c\/span\u003e\u003c\/p\u003e \u003cp class=\"Indent\" style=\"MARGIN: 0in 21pt 0pt; TEXT-ALIGN: justify\"\u003e\u003cspan style=\"FONT-FAMILY: ＭＳ明朝; mso-fareast-language: JA; mso-fareast-font-family: 'MS PMincho'\"\u003e\u003co:p\u003e\u003c\/o:p\u003e \u003c\/span\u003e\u003c\/p\u003e \u003cp class=\"Indent\" style=\"MARGIN: 0in 21pt 0pt; TEXT-ALIGN: justify\"\u003e\u003cspan style=\"FONT-FAMILY: ＭＳ明朝; mso-fareast-language: JA; mso-fareast-font-family: 'MS PMincho'\"\u003e\u003co:p\u003e\u003c\/o:p\u003e \u003c\/span\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003eSEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM) \u003cbr\u003e SEMI E52 — Practice for Referencing Gases Used in Digital Mass Flow Controllers \u003cbr\u003e SEMI E63 — Mechanical Specification for 300 mm Box Opener\/Loader to Tool Standard (BOLT)\u003cbr\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI E6-0303 - Superseded","offer_id":40234258104387,"sku":"3840","price":38100.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/EVolume_4c38b8d5-b8f9-44c2-8cd0-5f67648ac00c.png?v=1776702802","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/e00600-semi-e6-%e5%8d%8a%e5%b0%8e%e4%bd%93%e8%a3%bd%e9%80%a0%e8%a3%85%e7%bd%ae%e3%81%ae%e8%a8%ad%e7%bd%ae%e3%81%ab%e9%96%a2%e3%81%99%e3%82%8b%e6%96%87%e6%9b%b8%e3%81%ae%e3%82%ac%e3%82%a4%e3%83%89","provider":"SEMI Dev 2","version":"1.0","type":"link"}