{"product_id":"d05400-semi-d54-specification-for-substrate-management-of-fpd-production-sms-fpd","title":"D05400 - SEMI D54 - Specification for Substrate Management of FPD Production (SMS-FPD)","description":"\u003cp\u003eThis standard was technically approved by the global Flat Panel Display – Factory Automation Committee. This edition was approved for publication by the global Audits \u0026amp; Reviews Subcommittee on May 13, 2009. It was available at www.semi.org in June 2009. \u003c\/p\u003e \u003cp\u003e \u003c\/p\u003e \u003cp\u003eE This standard was editorially modified in October 2009 to correct editorial errors. Changes were made to ¶¶ 7.3.4.2, 10.2.3.4, 10.2.3.5, and 10.2.3.6. \u003c\/p\u003e \u003cp\u003e \u003c\/p\u003e \u003cp\u003eAt the production line of FPD, an automation evolution is underway; however, the reality is that each fab controls its equipment with its own specification. Because of this, a huge loss has been created in terms of the automation cost and lead time of equipment. Also, due to the migration to large substrate sizes in FPD production, the necessity to meet new demands such as single substrate transfer has been increasing. This document describes standard behaviors for automated transfer of substrates among automated material handling systems (AMHS) and equipment at FPD fabs. \u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfonthelv\u003e\u003cfonthelv\u003e \u003cp dir=\"ltr\"\u003e\u003cfonttimes new roman size=\"3\"\u003eSEMI D51 — Specification for Handshake Protocol of Single Substrate for Handling off\/on Tool in FPD Production\u003cbr\u003e \u003cp dir=\"ltr\"\u003e\u003cfonttimes new roman size=\"3\"\u003eSEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)\u003cbr\u003e \u003cp dir=\"ltr\"\u003e\u003cfonttimes new roman size=\"3\"\u003eSEMI E39 — Object Services Standard: Concepts, Behavior, and Services\u003cbr\u003e \u003cp dir=\"ltr\"\u003e\u003cfonttimes new roman size=\"3\"\u003eSEMI E40 — Standard for Processing Management\u003cbr\u003e \u003cp dir=\"ltr\"\u003e\u003cfonttimes new roman size=\"3\"\u003eSEMI E41 — Exception Management (EM) Standard\u003cbr\u003e \u003cp dir=\"ltr\"\u003e\u003cfonttimes new roman size=\"3\"\u003eSEMI E53 — Event Reporting\u003cbr\u003e \u003cp dir=\"ltr\"\u003e\u003cfonttimes new roman size=\"3\"\u003eSEMI E90 — Specification for Substrate Tracking\u003cbr\u003e\u003c\/fonttimes\u003e\u003c\/p\u003e\u003c\/fonttimes\u003e\u003c\/p\u003e\u003c\/fonttimes\u003e\u003c\/p\u003e\u003c\/fonttimes\u003e\u003c\/p\u003e\u003c\/fonttimes\u003e\u003c\/p\u003e\u003c\/fonttimes\u003e\u003c\/p\u003e\u003c\/fonttimes\u003e\u003c\/p\u003e\u003c\/fonthelv\u003e\u003c\/fonthelv\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI D54-0709E - Inactive","offer_id":40234241916995,"sku":"3176","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI D54-0709 - Superseded","offer_id":40234241949763,"sku":"12582","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/DVolume_44b03a38-44d8-41ce-b1ea-e07a4bd5057d.png?v=1776702949","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/d05400-semi-d54-specification-for-substrate-management-of-fpd-production-sms-fpd","provider":"SEMI Dev 2","version":"1.0","type":"link"}