{"product_id":"c09700-semi-c97-specification-for-determination-of-particle-levels-of-gases-delivered-as-pipeline-gas-or-by-pressurized-gas-cylinder","title":"C09700 - SEMI C97 - Specification for Determination of Particle Levels of Gases Delivered as Pipeline Gas or by Pressurized Gas Cylinder","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 17, 2018. Available at www.semiviews.org and www.semi.org in November 2018.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eNOTICE: This Document replaces SEMI C6.2, SEMI C6.3, SEMI C6.4, SEMI C6.5, SEMI C6.6, and SEMI C6.7.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis Document is intended to provide particle specification and test method for oxygen (O\u003csub\u003e2\u003c\/sub\u003e), hydrogen (H\u003csub\u003e2\u003c\/sub\u003e), and nitrogen (N\u003csub\u003e2\u003c\/sub\u003e) gases that are delivered as pipeline (bulk) gases or those contained in high pressure gas cylinders, in order to control particulate contamination from those gases.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis Document provides particle specification for gases, delivery source and particle grades as listed in Table 1.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eNone.\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI C97-1118 - Current","offer_id":40234241196099,"sku":"2202","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_8365f15e-2d1f-48b9-9736-6fd521c3e86a.png?v=1776703053","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/c09700-semi-c97-specification-for-determination-of-particle-levels-of-gases-delivered-as-pipeline-gas-or-by-pressurized-gas-cylinder","provider":"SEMI Dev 2","version":"1.0","type":"link"}