{"product_id":"c09500-semi-c95-guide-for-pentakis-dimethylamino-tantalum","title":"C09500 - SEMI C95 - Guide for Pentakis Dimethylamino Tantalum","description":"\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e\u003cfont size=\"2\" face=\"Microsoft Sans Serif\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on March 16, 2016. Available at www.semiviews.org and www.semi.org in May 2016.\u003c\/p\u003e\n\u003cspan lang=\"EN-GB\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe purpose of this Document is to provide a guide for pentakis dimethylamino tantalum (PDMAT) for which a need has been identified.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe scope of this Document covers a tier of PDMAT, which is used in the semiconductor industry for the deposition of tantalum nitride based layers by atomic layer deposition.\u003c\/p\u003e\n\u003cspan lang=\"EN-GB\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\n\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eNone.\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/span\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/font\u003e","brand":"semi.org","offers":[{"title":"SEMI C95-0516 - Current","offer_id":40234233430083,"sku":"2200","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_pc_ea0f913a-960f-4a9c-8aa9-4ea9c8cf155b.png?v=1776703054","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/c09500-semi-c95-guide-for-pentakis-dimethylamino-tantalum","provider":"SEMI Dev 2","version":"1.0","type":"link"}