{"product_id":"c08000-semi-c80-guide-for-tetrakisdimethylamino-silane-tdmas","title":"C08000 - SEMI C80 - Guide for Tetrakis(Dimethylamino) Silane (TDMAS)","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eThe purpose of this Document is to provide a guide for tetrakis(dimethylamino) silane (TDMAS) for which a need has been identified.\u003c\/font\u003e\u003c\/p\u003e\u003cspan lang=\"EN-GB\"\u003e\u003cfont size=\"2\"\u003e \u003c\/font\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003eThe scope of this Document covers high purity TDMAS which is used in the semiconductor industry for the deposition of silicon oxide and silicon nitride based layers by atomic layer deposition.\u003c\/font\u003e\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e　\u003c\/font\u003e\u003c\/p\u003e\n\u003cfont face=\"arial\" size=\"2\"\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003c\/font\u003e\u003cp\u003e\u003cspan lang=\"EN-GB\"\u003e\u003cfont face=\"arial\" size=\"2\"\u003e SEMI C1 — Guide for the Analysis of Liquid Chemical\u003c\/font\u003e\u003cbr\u003e\u003c\/span\u003e\u003c\/p\u003e\u003c\/span\u003e","brand":"semi.org","offers":[{"title":"SEMI C80-0214 - Inactive","offer_id":43106908897347,"sku":"2183","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI C80-0113 - Superseded","offer_id":40234240442435,"sku":"11959","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_pc_6830ca63-ce3b-4ac1-9521-64b00ef36566.png?v=1776703064","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/c08000-semi-c80-guide-for-tetrakisdimethylamino-silane-tdmas","provider":"SEMI Dev 2","version":"1.0","type":"link"}