{"product_id":"c07700-semi-c77-test-method-for-determining-the-counting-efficiency-of-liquid-borne-particle-counters-for-which-the-minimum-detectable-particle-size-is-between-30-nm-and-100-nm","title":"C07700 - SEMI C77 - Test Method for Determining the Counting Efficiency of Liquid-Borne Particle Counters for Which the Minimum Detectable Particle Size is Between 30 nm and 100 nm","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 22, 2018. Available at www.semiviews.org and www.semi.org in August 2018; originally published September 2012; previously published June 2018.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis Document is to provide a test sequence for determining the counting efficiency of liquid-borne particle counters for which the minimum detectable particle size is between 30 nm and 100 nm.\u003c\/p\u003e\u003cfont size=\"2\" face=\"Arial\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis Document covers the counting efficiency test system for liquid-borne particle counters by using the quantified particle number concentration sample.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis Document defines the test conditions for the counting efficiency test of liquid-borne particle counters.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe following areas are to be addressed in this Document:\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e• Mass concentration of original polystyrene latex (PSL) particle suspension\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e• Factor for calculating the dilution ratio such as fluid, flow rate, pressure, volume, PSL particle number concentration, etc.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e• Type of an equipment under test (EUT) liquid-borne particle counter\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e• Type of PSL particles\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e• Description of the test report\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"left\"\u003e\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\n\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003eSEMI F63 — Guide for Ultrapure Water Used in Semiconductor Processing\u003cbr\u003e SEMI F104 — Particle Test Method Guide for Evaluation of Components Used in Ultrapure Water and Liquid Chemical Distribution Systems\u003cbr\u003e\u003c\/p\u003e\u003c\/font\u003e","brand":"semi.org","offers":[{"title":"SEMI C77-0818 - Current","offer_id":40234239590467,"sku":"2180","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI C77-0912 (Reapproved 0618) - Superseded","offer_id":40234239688771,"sku":"11957","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI C77-0912 - Superseded","offer_id":40234239787075,"sku":"11956","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_pc_d01e5369-0976-4260-ac05-cb13032c85c1.png?v=1776703067","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/c07700-semi-c77-test-method-for-determining-the-counting-efficiency-of-liquid-borne-particle-counters-for-which-the-minimum-detectable-particle-size-is-between-30-nm-and-100-nm","provider":"SEMI Dev 2","version":"1.0","type":"link"}