{"product_id":"c07600-semi-c76-guide-for-zirconium-tert-butoxide","title":"C07600 - SEMI C76 - Guide for Zirconium Tert-Butoxide","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 2016. Available at www.semiviews.org and www.semi.org in March 2017; originally published August 2011.\u003c\/p\u003e\u003cspan lang=\"EN-GB\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe purpose of this Document is to provide a guide for zirconium tert-butoxide for which a need has been identified.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe scope of this Document covers high purity zirconium tert-butoxide which is used in the semiconductor industry for the deposition of zirconium oxide based layers by atomic layer deposition or chemical vapor deposition.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\n\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cspan lang=\"EN-GB\" style=\"FONT-FAMILY:\" arial mso-ansi-language: en-gb\u003e\u003cfont\u003e\u003cspan lang=\"EN-GB\"\u003e SEMI C1 — Guide for the Analysis of Liquid Chemicals\u003cbr\u003e\u003c\/span\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003c\/span\u003e","brand":"semi.org","offers":[{"title":"SEMI C76-0811 (Reapproved 0317) - Current","offer_id":40234243981379,"sku":"2179","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI C76-0811 - Superseded","offer_id":40234244079683,"sku":"11954","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_pc_e083aeb6-7e3b-438d-a643-66f476931b51.png?v=1776703068","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/c07600-semi-c76-guide-for-zirconium-tert-butoxide","provider":"SEMI Dev 2","version":"1.0","type":"link"}