{"product_id":"c07500-semi-c75-guide-for-tetrakisdimethylaminotitanium","title":"C07500 - SEMI C75 - Guide for Tetrakis(Dimethylamino)Titanium","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 2016. Available at www.semiviews.org and www.semi.org in March 2017; originally published August 2011.\u003c\/p\u003e\u003cspan lang=\"EN-GB\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe purpose of this Document is to provide a guide for tetrakis(dimethylamino)titanium for which a need has been identified.\u003c\/p\u003e\n\u003cspan lang=\"EN-GB\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe scope of this Document covers high purity tetrakis(dimethylamino)titanium which is used in the semiconductor industry primarily, but not exclusively, for the deposition of titanium nitride layers by atomic layer deposition or chemical vapor deposition.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\n\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003c\/p\u003e\n\u003cp class=\"StdsText\" style=\"MARGIN:\"\u003e\u003cspan lang=\"EN-GB\" style=\"FONT-FAMILY:\" arial mso-ansi-language: en-gb\u003e\u003cfont\u003eSEMI C1 — Guide for the Analysis of Liquid Chemicals\u003co:p\u003e\u003c\/o:p\u003e\u003cbr\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003c\/span\u003e\u003c\/span\u003e","brand":"semi.org","offers":[{"title":"SEMI C75-0811 (Reapproved 0317) - Current","offer_id":40234240901187,"sku":"2178","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI C75-0811 - Superseded","offer_id":40234241130563,"sku":"11953","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_pc_145a99e3-db32-4e76-b597-556a15c1be48.png?v=1776703068","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/c07500-semi-c75-guide-for-tetrakisdimethylaminotitanium","provider":"SEMI Dev 2","version":"1.0","type":"link"}