{"product_id":"c07400-semi-c74-guide-for-hafnium-tert-butoxide","title":"C07400 - SEMI C74 - Guide for Hafnium Tert-Butoxide","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on July 1, 2011. Available at www.semiviews.org and www.semi.org in March 2017; originally published August 2011.\u003c\/p\u003e\u003cspan lang=\"EN-GB\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe purpose of this Document is to provide a guide for hafnium tert-butoxide for which a need has been identified.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe scope of this Document covers high purity hafnium tert-butoxide which is used in the semiconductor industry for the deposition of hafnium oxide based layers by atomic layer deposition or chemical vapor deposition.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\n\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003c\/p\u003e\n\u003cp class=\"StdsText\" style=\"MARGIN:\"\u003e\u003cspan lang=\"EN-GB\" style=\"FONT-FAMILY:\" arial mso-ansi-language: en-gb\u003e\u003cfont\u003eSEMI C1 — Guide for the Analysis of Liquid Chemicals\u003co:p\u003e\u003c\/o:p\u003e\u003cbr\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003c\/span\u003e","brand":"semi.org","offers":[{"title":"SEMI C74-0811 (Reapproved 0317) - Current","offer_id":40234242670659,"sku":"2177","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI C74-0811 - Superseded","offer_id":40234242768963,"sku":"11952","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_pc_c0de335c-cf21-4492-a23e-fa6592484b41.png?v=1776703069","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/c07400-semi-c74-guide-for-hafnium-tert-butoxide","provider":"SEMI Dev 2","version":"1.0","type":"link"}