{"product_id":"c06800-semi-c68-guide-for-zirconium-amides","title":"C06800 - SEMI C68 - Guide for Zirconium Amides","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 2016. Available at www.semiviews.org and www.semi.org in March 2017; originally published August 2011.\u003c\/p\u003e\u003cspan lang=\"EN-GB\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe purpose of this Document is to provide a guide for zirconium amides for which a need has been identified.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe scope of this Document covers high purity zirconium amides, namely, tetrakis(dimethylamino) zirconium, tetrakis(diethylamino) zirconium and tetrakis(ethylmethylamino) zirconium which are used in the semiconductor industry for the deposition of zirconium oxide based layers by atomic layer deposition.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\n\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003c\/p\u003e\n\u003cp class=\"StdsText\" style=\"MARGIN:\"\u003e\u003cspan lang=\"EN-GB\" style=\"FONT-FAMILY:\" arial mso-ansi-language: en-gb\u003e\u003cfont\u003e\u003cfont\u003eSEMI C1 — Guide for the Analysis of Liquid Chemicals\u003co:p\u003e\u003c\/o:p\u003e\u003cbr\u003e\u003c\/font\u003e\u003c\/font\u003e\u003c\/span\u003e\u003c\/p\u003e\u003c\/span\u003e","brand":"semi.org","offers":[{"title":"SEMI C68-0811 (Reapproved 0317) - Current","offer_id":40234239918147,"sku":"2170","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI C68-0811 - Superseded","offer_id":40234240245827,"sku":"11944","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_pc_72284494-8be6-499a-a058-c1545e724cdf.png?v=1776703074","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/c06800-semi-c68-guide-for-zirconium-amides","provider":"SEMI Dev 2","version":"1.0","type":"link"}