{"product_id":"c06600-semi-c66-guide-for-trimethylaluminium-tmai-99-5-quality","title":"C06600 - SEMI C66 - Guide for Trimethylaluminium (TMAI), 99.5% Quality","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 2016. Available at www.semiviews.org and www.semi.org in March 2017; originally published February 2008.\u003c\/p\u003e\u003cspan lang=\"EN-GB\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe purpose of this Document is to provide a guide for trimethylaluminum (TMAl) used in the semiconductor industry.\u003c\/p\u003e\n\u003cspan lang=\"EN-GB\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe scope of this Document covers a Tier of high purity TMAl, which is used in the semiconductor industry for the deposition of aluminium metal by vapor deposition techniques and aluminium oxide based layers by atomic layer deposition.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\n\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cspan lang=\"EN-GB\"\u003e SEMI C1 — Guide for the Analysis of Liquid Chemicals\u003cbr\u003e\u003c\/span\u003e\u003c\/p\u003e\u003c\/span\u003e\u003c\/span\u003e","brand":"semi.org","offers":[{"title":"SEMI C66-0317 - Inactive","offer_id":43106909716547,"sku":"2168","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI C66-0308 - Superseded","offer_id":40234235920451,"sku":"11942","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_pc_d2adb27b-df2a-42a0-ae25-11c6df0a5ab6.png?v=1776703075","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/c06600-semi-c66-guide-for-trimethylaluminium-tmai-99-5-quality","provider":"SEMI Dev 2","version":"1.0","type":"link"}