{"product_id":"c06300-semi-c63-specification-for-organosilicate-precursors-used-in-low-k-cvd-processes","title":"C06300 - SEMI C63 - Specification for Organosilicate Precursors Used in Low K CVD Processes","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www.semiviews.org and www.semi.org in June 2018; originally published November 2007; previously published November 2008.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe purpose of this Document is to provide guidelines for organosilicate precursors used in Low K CVD processes and to standardize testing procedures to support those requirements. These test methods have been shown to give statistically valid results.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe scope of this Document lists the proposed impurity limits for organosilicate precursors (e.g., Dimethyldimethoxysilane, Octamethylcyclotetrasiloxane, Diethoxymethylsilane, Tetramethylcyclotetrasiloxane) used in the semiconductor industry.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003eSEMI C1 — Guide for the Analysis of Liquid Chemicals\u003cbr\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI C63-1108 (Reapproved 0618) - Current","offer_id":40234237657155,"sku":"2164","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI C63-1108 - Superseded","offer_id":40234237820995,"sku":"11938","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI C63-1107 - Superseded","offer_id":40234237952067,"sku":"11937","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_pc_76044433-d6f6-47fa-b10c-4d35d271a9d0.png?v=1776703077","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/c06300-semi-c63-specification-for-organosilicate-precursors-used-in-low-k-cvd-processes","provider":"SEMI Dev 2","version":"1.0","type":"link"}