{"product_id":"c06200-semi-c62-specification-for-progen-precursors-used-in-low-k-cvd-processes","title":"C06200 - SEMI C62 - Specification for Progen Precursors Used in Low K CVD Processes","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www.semiviews.org and www.semi.org in June 2018; originally published November 2007; previously published March 2009.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe purpose of this Document is to provide specifications for porogen precursors used in Low K CVD processes for which a need has been identified.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe scope of this Document lists the proposed impurity limits for porogen precursors (e.g., alpha-terpinine, limonene, bicycloheptadiene, and cyclooctane) used in the semiconductor industry.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003eSEMI C1 — Guide for the Analysis of Liquid Chemicals\u003cbr\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI C62-0309 (Reapproved 0618) - Current","offer_id":40234239066179,"sku":"2163","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI C62-0309 - Superseded","offer_id":40234239262787,"sku":"11935","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI C62-1107 - Superseded","offer_id":40234239426627,"sku":"11936","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_pc_702fabab-9a87-4753-a381-1f14cdbc6eea.png?v=1776703078","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/c06200-semi-c62-specification-for-progen-precursors-used-in-low-k-cvd-processes","provider":"SEMI Dev 2","version":"1.0","type":"link"}