{"product_id":"c03800-semi-c38-guideline-for-phosphorus-oxychloride","title":"C03800 - SEMI C38 - Guide for Phosphorus Oxychloride","description":"\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eNOTICE: \u003c\/strong\u003eThis Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e1  Purpose\u003cbr\u003e1.1  The purpose of this Standard is to provide a guide for a grade of phosphorus oxychloride for which a need has been identified.\u003cbr\u003e2  Scope\u003cbr\u003e2.1  This Standard lists the proposed impurity limits of phosphorus oxychloride for a grade used in the semiconductor industry.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards \u003c\/strong\u003e(purchase separately)\u003cbr\u003eSEMI C1 — Guide for the Analysis of Liquid Chemicals\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI C38-0212 (technical revision)\u003cbr\u003eSEMI C38-0306 (technical revision)\u003cbr\u003eSEMI C38-0699 (first published)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI C38-0212 - Inactive","offer_id":43106868756547,"sku":"18259","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI C38-0306 - Superseded","offer_id":40234365222979,"sku":"11865","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI C38-0699 - Superseded","offer_id":40234365354051,"sku":"11866","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_pc_97ebcafb-fc04-4c0a-850a-cbb24fcea42f.png?v=1776701916","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/c03800-semi-c38-guideline-for-phosphorus-oxychloride","provider":"SEMI Dev 2","version":"1.0","type":"link"}