{"product_id":"c00606-semi-c6-6-particle-specification-for-grade-10-0-1-nitrogen-n2-and-argon-ar-delivered-as-pipeline-gas","title":"C00606 - SEMI C6.6 - Particle Specification for Grade 10\/0.1 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12, 2011. Available at www.semiviews.org and www.semi.org in November 2011; originally published in 1990; previously published November 2002.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eNOTICE: This Document is no longer supported by the global technical committee. It has been replaced by SEMI C97.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe purposes of this Document are: (1) to set a maximum permissible particle concentration for 10\/0.1 grade nitrogen and argon bulk supply gases, and (2) to describe a reference method for its verification.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis Document applies only to nitrogen gas and argon gas delivered through pipelines; it is not applicable to cylinder gases or gases in their liquid state.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eNone.\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI C6.6-90 (Reapproved 1111) - Replaced","offer_id":40234236051523,"sku":"2742","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI C6.6-90 (Reapproved 1102) - Superseded","offer_id":40234236215363,"sku":"11930","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_20b03fdb-3654-4a90-b75c-73de52a90454.png?v=1776703013","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/c00606-semi-c6-6-particle-specification-for-grade-10-0-1-nitrogen-n2-and-argon-ar-delivered-as-pipeline-gas","provider":"SEMI Dev 2","version":"1.0","type":"link"}