{"product_id":"c00352-semi-c3-52-standard-for-tungsten-hexafluoride-99-996-quality","title":"C00352 - SEMI C3.52 - Standard for Tungsten Hexafluoride, 99.996% Quality","description":"\u003cfont face=\"Arial\" size=\"2\"\u003e\u003cfont face=\"Arial\" size=\"2\"\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard was technically approved by the global Gases Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 24, 2011. Available at www.semiviews.org and www.semi.org in March 2012; originally published in 1995; previously published June 2000.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eNOTICE: This Document was balloted and approved for withdrawal in 2011; replaced by SEMI C70.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eTo define the specification and analytical methods and validate the specifications for WF\u003csub\u003e6\u003c\/sub\u003e.\u003c\/p\u003e\n\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\n\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003e\u003cfont\u003eNone.\u003cbr\u003e\u003c\/font\u003e\u003c\/p\u003e\u003c\/font\u003e\u003c\/font\u003e","brand":"semi.org","offers":[{"title":"SEMI C3.52-0200 (Withdrawn 0312) - Replaced","offer_id":40234235330627,"sku":"2729","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI C3.52-0200 - Superseded","offer_id":40234235363395,"sku":"11820","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_86e94448-e363-436c-940a-74d2b863d366.png?v=1776703018","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/c00352-semi-c3-52-standard-for-tungsten-hexafluoride-99-996-quality","provider":"SEMI Dev 2","version":"1.0","type":"link"}