{"product_id":"c00327-semi-c3-27-specification-for-boron-trifluoride-bf3-in-cylinders-99-0-quality","title":"C00327 - SEMI C3.27 - Specification for Boron Trifluoride (BF3) in Cylinders, 99.0% Quality","description":"\u003cp dir=\"ltr\" align=\"justify\"\u003eThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at www.semiviews.org and www.semi.org in January 2018; originally published in 1984; previously published October 2011.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThe purpose of this Document is to provide a specification for boron trifluoride (BF\u003csub\u003e3\u003c\/sub\u003e) used in the semiconductor industry.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e \u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eThis Document covers requirements for boron trifluoride (BF\u003csub\u003e3\u003c\/sub\u003e) used in the semiconductor industry.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003eIf analytical methods are not complete, the requirements are presented as a guideline.\u003c\/p\u003e \u003cp dir=\"ltr\" align=\"justify\"\u003e\u003c\/p\u003e\u003cp dir=\"ltr\" align=\"justify\"\u003e　\u003c\/p\u003e\u003cb\u003eReferenced SEMI Standards\u003c\/b\u003e\u003cbr\u003e\u003cp\u003eSEMI C1 — Guide for the Analysis of Liquid Chemicals\u003cbr\u003e SEMI C3 — Specification for Gases\u003cbr\u003e\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI C3.27-1102 (Reapproved 0118) - Current","offer_id":40234227793987,"sku":"2126","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI C3.27-1102 (Reapproved 1011) - Superseded","offer_id":40234227859523,"sku":"11785","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI C3.27-1102 - Superseded","offer_id":40234227925059,"sku":"11784","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/CVolume_e0346167-3a0b-4eb2-bf22-8e6becf351e4.png?v=1776703117","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/c00327-semi-c3-27-specification-for-boron-trifluoride-bf3-in-cylinders-99-0-quality","provider":"SEMI Dev 2","version":"1.0","type":"link"}