{"product_id":"3d01100-semi-3d11-terminology-for-through-glass-via-and-blind-via-in-glass-geometrical-metrology","title":"3D01100 - SEMI 3D11 - Terminology for Through Glass Via and Blind Via in Glass Geometrical Metrology","description":"\u003cp class=\"StdsText\"\u003e \u003c\/p\u003e\u003cp\u003e1  Purpose\u003cbr\u003e1.1  The purpose of this Standard is to provide clear and commonly accepted definitions of through glass via (TGV) and to provide a consistent terminology for the understanding and discussion of metrology issues important them.\u003cbr\u003e2  Scope\u003cbr\u003e2.1  This Standard attempts to describe measurands and geometrical features of through and blind vias in glass.\u003cbr\u003e2.2  The focus of this Standard is on geometry-related metrology and measurands important for definition and control of fabrication and inspection operations on structures that include openings for TGV.\u003cbr\u003e2.3  This Standard is intended for through glass vias and blind vias in glass.\u003cbr\u003e2.4  This Standard can be applied to all through and blind vias as they occur in any flat surfaces made of glass, for instance wafers or sheets.\u003cbr\u003e2.5  This Standard adopts and adapts structure and wording from SEMI 3D1, Terminology for Through Silicon Via Metrology.\u003cbr\u003e\u003cstrong\u003eNOTICE:\u003c\/strong\u003e SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eReferenced SEMI Standards\u003c\/strong\u003e (purchase separately)\u003cbr\u003eSEMI 3D1 — Terminology for Through Silicon Via Geometrical Metrology\u003cbr\u003e\u003cstrong\u003eNOTICE:\u003c\/strong\u003e Unless otherwise indicated, all documents cited shall be the latest published versions.\u003c\/p\u003e\u003cp\u003e \u003c\/p\u003e\u003cp\u003e\u003cstrong\u003eRevision History\u003c\/strong\u003e\u003cbr\u003eSEMI 3D11-1214 (Reapproved 1125)\u003cbr\u003eSEMI 3D11-1214 (Reapproved 0420)\u003cbr\u003eSEMI 3D11-1214 (first published)\u003c\/p\u003e","brand":"semi.org","offers":[{"title":"SEMI 3D11-1214 (Reapproved 1125) - Current","offer_id":43106911617091,"sku":"18806","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI 3D11-1214 (Reapproved 0420) - Superseded","offer_id":43106911649859,"sku":"13816","price":31900.0,"currency_code":"JPY","in_stock":true},{"title":"SEMI 3D11-1214 - Superseded","offer_id":40234240507971,"sku":"992","price":31900.0,"currency_code":"JPY","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0567\/3402\/3747\/files\/3DVolume_c999a491-fdd8-41ab-a855-654fb91c0ffd.png?v=1776703141","url":"https:\/\/store-dev2.semi.org\/en-jp\/products\/3d01100-semi-3d11-terminology-for-through-glass-via-and-blind-via-in-glass-geometrical-metrology","provider":"SEMI Dev 2","version":"1.0","type":"link"}