SEMI Standards

SEMI International Standards form the foundation for innovation in the microelectronics industry. The SEMI Standards process has been used to create more than 1,000 industry approved Standards and Safety Guidelines, based on the work of more than 5,000 volunteers in key topics including safety, materials, packaging, traceability and cybersecurity. For 50 years, SEMI Standards have helped reduce manufacturing complexity, which enables customer cost reduction, improved supplier quality, and shorter time-to-market. Each year, more than 1,000 companies purchase and use SEMI Standards to improve manufacturing operations.

Individual SEMI Standards

Individual SEMI Standards are available for immediate download. You may view the abstract of a Standard before purchasing. SEMI Standards currently use PDF file format and are DRM-protected, which requires Adobe Acrobat Reader and the FileOpen Plug-In. Refer to the DRM FAQs for details.


Search for Standards by using the Search form at the top of the page or browse Current Standards by Volume, Topic, Language and Publishing Cycle below.

 

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E15600 - SEMI E156 - 搬送インタフェースに対する450 mm AMHSストッカーの機械的仕様
E15700 - SEMI E157 - Specification for Module and Substrate Process TrackingE15700 - SEMI E157 - Specification for Module and Substrate Process Tracking
E15700 - SEMI E157 - モジュールプロセストラッキングの仕様
SEMI E157 - モジュールプロセストラッキングの仕様 Sale priceMember Price: ¥135
Non-Member Price: ¥38,100
E15800 - SEMI E158 - 450 mmウェーハ搬送および保管用の工場ウェーハキャリア(450FOUP)とキネマティックカプリングの機械仕様
E15800 - SEMI E158 - Specification for Mechanical Features of Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling
E15900 - SEMI E159 - Specification for Mechanical Features of Multi Application Carrier (MAC) Used to Transport and Ship 450 mm Wafers
E15900 - SEMI E159 - ウェーハの搬送及び,輸送のための多目的キャリア(MAC:Multi Application Carrier)の機械仕様
E16000 - SEMI E160 - Specification for Communication of Data Quality
SEMI E160 - Specification for Communication of Data Quality Sale priceMember Price: ¥113
Non-Member Price: ¥31,800
E16100 - SEMI E161 - Guide for Identification and Classification of Training Tiers
SEMI E161 - Guide for Identification and Classification of Training Tiers Sale priceMember Price: ¥113
Non-Member Price: ¥31,800
E16100 - SEMI E161 - トレーニング階層の明確化および分類に関するガイド
SEMI E161 - トレーニング階層の明確化および分類に関するガイド Sale priceMember Price: ¥135
Non-Member Price: ¥38,100
E16200 - SEMI E162 - 450 mmフロントオープニング・シッピングボックス・ロードポートのためのメカニカルインタフェースの仕様
E16200 - SEMI E162 - Mechanical Interface Specification for 450 mm Front-Opening Shipping Box Load Port
E16300 - SEMI E163 - Guide for the Handling of Reticles and Other Extremely Electrostatic Sensitive (EES) Items Within Specially Designated Areas
E16300 - SEMI E163 - 特別に指定されたエリア内のレチクルおよびその他の静電気超敏感性(EES:EXTREMELY ELECTROSTATIC SENSITIVE)アイテムの取り扱いのためのガイド
E16400 - SEMI E164 - Specification for EDA Common Metadata
SEMI E164 - Specification for EDA Common Metadata Sale priceMember Price: ¥113
Non-Member Price: ¥31,800
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